Tungsten Hexafluoride Reclamation Using Silicon Reaction Chambers
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Solution Overview
Problem
The existing semiconductor manufacturing processes generate waste byproducts such as unused tungsten hexafluoride, which contribute to environmental pollution and waste management issues.
Innovation Solution
A semiconductor manufacture reclamation system is developed, which includes a chemical vapor deposition system that reacts waste tungsten hexafluoride with silicon to produce solid tungsten compounds, thereby reducing waste and enabling the reuse of tungsten.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If waste tungsten hexafluoride is vented through a waste gas vent, then the chemical vapor deposition system can continue operation, but environmental pollution and waste management issues occur
Solution Approach 1:
The patent converts the harmful waste gas (tungsten hexafluoride) into a beneficial product (solid tungsten compound) by introducing it to a reaction chamber containing silicon. The waste gas reacts with silicon to produce solid tungsten compounds that can be collected and reused, transforming an environmental hazard into a valuable resource while maintaining continuous CVD operation
2Loss of substance
If waste tungsten hexafluoride is reacted with silicon to produce solid tungsten compounds, then tungsten can be recovered and reused, but additional equipment and process complexity are required
Solution Approach 1:
The patent merges the waste gas treatment function with the tungsten recovery function into a single integrated reaction chamber. The reaction chamber simultaneously serves to neutralize the harmful waste gas and produce recoverable solid tungsten compounds, combining what could be separate processes into one unified operation that reduces overall system complexity
Solution Approach 2:
Silicon serves as an intermediary substance that facilitates the conversion of waste tungsten hexafluoride gas into solid tungsten compounds. The silicon reacts with the waste gas to form intermediate products that ultimately yield recoverable solid tungsten, acting as a mediator that enables the transformation from harmful gas to useful solid material
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces the amount of waste gas, allows for the recovery of valuable tungsten metal, and minimizes environmental impact by converting hazardous waste into reusable materials.
Implementation Method 1
a chemical vapor deposition system that reacts waste tungsten hexafluoride with silicon to produce solid tungsten compounds
Implementation Method 2
reacts waste tungsten hexafluoride with silicon to produce solid tungsten compounds
Data Source
AI summary
A semiconductor manufacture reclamation system and associated methods are shows. Example systems and methods include semiconductor processing machinery and a reaction chamber coupled along a path of a waste gas vent. Systems and methods are shown that include an amount of silicon to react with a waste gas including tungsten.