Upper Electrode Fastening Ring for Uniform Etching Contact
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Solution Overview
Problem
In etching process facilities, maintenance and repair operations often lead to errors in operating conditions, resulting in reduced productivity due to uneven contact areas between upper electrodes and the facility, necessitating additional maintenance and repair.
Innovation Solution
A fastening automation apparatus with a ring and multiple fastening modules that move radially to ensure even distribution of contact area between the upper electrode and the etching facility, utilizing a driving source, power transmission unit, and fastening bit to simultaneously install and rotate cam nuts on the upper electrode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual installation method is used, then installation flexibility is maintained, but contact area distribution becomes uneven leading to temperature defects
Solution Approach 1:
The installation system is segmented into multiple independent fastening modules (at least three modules) that can be independently positioned and operated around the upper electrode. Each module has its own driving source and fastening bit, allowing independent control of each fastening point to achieve uniform contact area distribution while maintaining efficient simultaneous operation
Solution Approach 2:
The manual mechanical installation process is replaced with an automated mechanical system featuring driving sources (motors), driving shafts, power transmission units (gears, pulleys), and movable frames. This substitution enables precise control of fastening bit positions and simultaneous rotation of multiple cam nuts, ensuring uniform torque application and contact area distribution across the upper electrode
2Productivity
If multiple fastening modules operate simultaneously, then installation time is reduced, but system complexity increases
Solution Approach 1:
Each fastening module is designed as a universal, multi-functional unit that integrates a driving source, driving shaft, power transmission unit, and fastening bit. These standardized modules can be replicated and positioned at multiple locations around the upper electrode, performing the same fastening function simultaneously. This modularity reduces overall system complexity by using identical components rather than custom-designed complex mechanisms
Solution Approach 2:
The fastening modules are arranged in a circular pattern around the upper electrode, utilizing the circumferential dimension. Each module is positioned at a different angular location but operates at the same radial distance from the center. This spatial arrangement allows simultaneous operation of multiple modules without interfering with each other, increasing productivity while maintaining manageable system complexity through symmetric distribution
3Manufacturing precision
If uniform torque is applied to all cam nuts, then contact area distribution improves, but installation time increases due to sequential operation
Solution Approach 1:
The system enables continuous simultaneous action by operating multiple fastening modules at the same time. All driving sources are activated concurrently, causing all fastening bits to rotate their respective cam nuts simultaneously. This continuous parallel operation achieves uniform contact area distribution across all fastening points while completing the installation in a single operation cycle, eliminating the time loss associated with sequential installation
Data Source
AI summary
A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.