Vacuum Chamber Alignment via Inverted Actuation
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Solution Overview
Problem
Existing precision alignment systems for optical elements and samples in vacuum chambers face challenges in achieving high precision and reproducibility due to mechanical backlash, resonance, and thermal misalignment, particularly when dealing with terahertz to hard X-ray radiation, where traditional serial and parallel kinematics mechanisms fail to provide sufficient accuracy and stability.
Innovation Solution
The system fixes the optical element or sample within the vacuum chamber and uses externally acting translational actuators connected via flexures, with a compact design and high-mass fundament to minimize resonance and mechanical stress, allowing for precise alignment by moving the vacuum chamber as a whole, ensuring independence of actuator movements and reducing parasitic motion through gimbal flexures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If serial kinematics is used to align optical elements in three translational degrees of freedom, then the control becomes very simple with vector addition of actuators' effects, but the alignment tolerances sum up and mechanical backlash results in static indeterminacy
Solution Approach 1:
Instead of moving the optical element relative to the vacuum chamber using multiple actuators (serial kinematics), the invention inverts the approach by firmly fixing the optical element and moving the entire vacuum chamber using a single translational actuator. This eliminates the accumulation of alignment tolerances and mechanical backlash while maintaining control simplicity.
2Manufacturing precision
If parallel kinematics (Stewart/Gough/Cappell platform) is used for precision alignment in six degrees of freedom, then the position of two circles is mechanically over determined and complex calculation algorithms are required for control
Solution Approach 1:
The invention extracts and eliminates the complex parallel kinematics mechanism entirely. Instead of using six legs with complex interdependencies, it uses a single translational actuator moving the vacuum chamber, thereby removing the need for complex calculation algorithms while achieving the same alignment precision.
3Reliability
If drives and connecting elements are kept as short as possible to avoid low-frequency eigenfrequencies, then resonance is reduced, but the alignment mechanisms become more compact with limited adjustment range
Solution Approach 1:
The invention changes the dimension of movement from moving the optical element (small range) to moving the entire vacuum chamber (large range). The single actuator moves the vacuum chamber over a large distance, providing extensive adjustment range while the connecting elements (bellows) remain compact to avoid resonance.
4Manufacturing precision
If multiple alignment mechanisms are combined to facilitate precision alignment in three translational degrees of freedom, then alignment capability is improved, but alignment tolerances sum up and mechanical backlash increases
Solution Approach 1:
The invention merges the optical element and vacuum chamber into a single fixed assembly. By firmly fixing the optical element within the vacuum chamber and moving the chamber as a whole, it eliminates the need for multiple separate alignment mechanisms, thereby preventing the summation of tolerances and mechanical backlash while improving reproducibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This setup achieves sub-arcsecond angular resolution and micrometer spatial resolution with reduced mechanical stress and improved reproducibility, enhancing the precision and lifespan of alignment equipment while maintaining vacuum integrity and minimizing resonance susceptibility.
Implementation Method 1
high-mass fundament to minimize resonance and mechanical stress
Implementation Method 2
externally acting translational actuators connected via flexures
Data Source
Figure 1~1''
Figure 2
Figure 3~4
AI summary
The invention concerns an adjustment system for aligning optical elements and/or samples in vacuum (3) for projecting electromagnetic radiation in the terahertz range up to the range of hard X-ray radiation, consisting of at least one vacuum chamber (3"), at least one mirror (3') adjustable in spatial direction and/or at least one optical element adjustable in spatial direction or at least one sample adjustable in spatial direction, with translational actuators (X1, X2, Z1, Z2, Z3) in the un- deflected state (idle state) being provided for adjusting the alignment of the at least one mirror (3') adjustable in spatial direction and/or the at least one optical element adjustable in spatial direction or the at least one sample adjustable in spatial direction in a maximum of three essentially mutually perpendicular spatial directions (X, Y, Z, y, y, z). Pursuant to the invention it is provided that the at least one mirror (3') adjustable in spatial direction (X, Y, Z, y, y, z) and/or the at least one optical element adjustable in spatial direction (X, Y, Z, y, y, z) or sample within the vacuum chamber (3") is mounted in a fixed position in relation to the vacuum chamber (3"), with the vacuum chamber (3") being directly or indirectly connected with the translational actuators (X1, X2, Z1, Z2, Z3) for aligning the spatial position of the mirror and/or the optical element or the sample. This setup facilitates a very compact and small design of the vacuum chamber and achieves a very high precision of the alignment.