Vacuum Chamber Heaters for Foreign Material Removal
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing processing devices for display substrates face challenges in removing foreign materials, such as organic solvents and light-emitting materials, which can contaminate the substrate and affect the quality of the thin film formed during the inkjet process.
Innovation Solution
A processing device with a vacuum chamber equipped with a first remover having a mesh network and an absorbent, such as charcoal, to adsorb organic materials, and a second remover outside the chamber connected by a connection pipe to exhaust foreign materials in a gaseous state, while heaters create a temperature gradient to facilitate fluid flow and removal of foreign materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional processing device is used for substrate treatment, then the processing can be completed, but foreign materials such as organic solvents and light-emitting materials remain and contaminate the substrate
Solution Approach 1:
The processing device is divided into distinct functional zones: a vacuum chamber for controlled processing, a first remover zone with mesh networks containing absorbents for capturing liquid foreign materials, and a second remover for gaseous materials. This segmentation allows each zone to address specific types of contamination, improving overall thin film quality by systematically removing different forms of foreign materials at different stages of the process.
Solution Approach 2:
Absorbent materials such as activated carbon or porous materials are introduced as intermediaries within the mesh networks. These absorbents act as mediators that selectively adsorb organic solvents and light-emitting materials from the processing environment, preventing them from contaminating the substrate while allowing the processing to continue. The intermediaries transform the harmful foreign materials into adsorbed states on the absorbent surfaces.
2Productivity
If heaters are used to create temperature gradient for fluid flow, then foreign materials can be removed more effectively, but energy consumption increases
Solution Approach 1:
The system utilizes temperature gradient as a controllable parameter to drive fluid flow and enhance foreign material removal. By adjusting the temperature difference between different zones, the system optimizes the flow of processing fluids through the vacuum chamber and remover zones, improving removal efficiency without requiring excessive energy input. The temperature parameter is precisely controlled to achieve the necessary flow dynamics while minimizing energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively reduces or eliminates foreign materials from the substrate by adsorbing and exhausting them, improving the quality of the thin film and enhancing the luminous efficiency of the display device.
Implementation Method 1
The first remover may include a mesh network and an absorbent disposed in the mesh network. The first remover may adsorb an organic material.
Implementation Method 2
a plurality of heaters disposed between the inner wall and the outer wall... the first heater may be configured to apply a first heating amount and the second heater may be configured to apply a second heating amount less than the first heating amount
Data Source
AI summary
A processing device for processing a substrate includes a vacuum chamber including a processing space including an inner wall disposed adjacent to the processing space and an outer wall disposed on and spaced apart from the inner wall, and a plurality of heaters disposed between the inner wall and the outer wall.