Vacuum Coating Segmentation for Energy and Speed
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Solution Overview
Problem
Vacuum coating systems, particularly horizontal in-line systems for architectural glass, face challenges in energy efficiency and throughput speed, leading to high operational costs and maintenance complexities.
Innovation Solution
The design incorporates a sequence of sputtering and gas separation segments with a continuous substrate plane, featuring a variable-volume air reservoir for efficient gas management and a multiple cathode configuration allowing for easy target changes without opening the vessel, along with a tunnel cover system for precise gas separation and minimal gas mixing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the conveying speed of substrates is increased in vacuum coating systems, then productivity is improved, but energy consumption increases and coating quality deteriorates
Solution Approach 1:
The vacuum chamber is divided into multiple independently controllable coating zones along the substrate conveyance path. Each zone can be evacuated and filled independently, allowing substrates to move through at higher speeds while maintaining optimal vacuum conditions in each zone for energy-efficient coating deposition.
Solution Approach 2:
The system uses periodic evacuation and filling cycles for different zones rather than maintaining continuous high vacuum throughout the entire chamber. This allows faster substrate conveyance while reducing overall energy consumption by only evacuating zones when substrates are present and need coating.
2Productivity
If the conveying speed of substrates is increased, then productivity is improved, but coating quality uniformity deteriorates
Solution Approach 1:
The chamber is segmented into multiple zones with independent vacuum control, allowing each zone to maintain optimal conditions for uniform coating deposition even as substrates move quickly through the system. Each zone can be optimized for specific coating requirements.
Solution Approach 2:
The system dynamically adjusts vacuum levels and coating parameters for each zone based on real-time substrate position and velocity, ensuring uniform coating quality across all substrates despite high conveying speeds.
3Reliability
If conventional vacuum coating systems are used, then coating processes are performed, but maintenance complexity and operational costs increase
Solution Approach 1:
The vacuum system is divided into modular zones that can be independently maintained and serviced. This reduces maintenance complexity by allowing targeted repairs without shutting down the entire system, and enables parallel maintenance operations in different zones.
Solution Approach 2:
The system incorporates self-diagnostic and self-adjustment capabilities that reduce the need for complex manual maintenance and monitoring, lowering operational costs and simplifying system management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances productivity by reducing energy consumption, simplifying maintenance, and improving the service life of the coating system while maintaining high-quality coating processes.
Implementation Method 1
coating by means of sputtering
Data Source
Figure 1
Figure 2a~2b
Figure 3
AI summary
Disclosed are an apparatus and a method for saving energy while increasing the conveying speed in vacuum coating plants consisting of a series of sputtering segments (3) and gas separation segments (2) along with a continuous substrate plane (1). Said apparatus has the following features: a) each of the sputtering segments (3) consists of a tank tub (12) inside which a conveying device (11) is located; the flange (6) of the tank is positioned in the immediate vicinity above the substrate plane (1); a cathode bearing block (5), along with targets (8) and gas inlet ducts (10), is located in the tank cover (4) in the immediate vicinity of the substrate together with splash guards (9); b) in the region of the substrate plane (1), the gas separation segments (2) are provided with a tunnel cover (14) that extends along the entire length of the gas separation segment (2); c) sputtering segments (3) and/or gas separation segments (2) are evacuated using one or more vacuum pumps (15), and the air pumped in said process is trapped in an air reservoir (25) having an adjustable volume.