Vacuum Chamber Evacuation Method Preventing Moisture Solidification

The patent applies preliminary anti-action by introducing a heating mechanism that pre-heats the chamber walls and components before evacuation begins. This prevents moisture from solidifying during the evacuation process by maintaining temperatures above the freezing point, thereby eliminating the harmful effect of moisture solidification while still achieving rapid evacuation.

The patent changes the temperature parameter of the chamber environment during evacuation. By controlling and maintaining the temperature above zero degrees Celsius through heating elements, the physical state of moisture is kept liquid rather than allowing it to transition to solid phase, thus preventing the formation of solidified moisture that would prolong evacuation time.

The heating mechanism is activated before and during the inert gas introduction phase, preemptively counteracting the temperature drop that will occur during subsequent depressurization. This ensures moisture remains in liquid state and continues to evaporate efficiently without solidifying when the adiabatic expansion occurs.

The patent employs periodic cycles of inert gas introduction followed by controlled depressurization, with heating continuously maintained throughout. This periodic action allows moisture to evaporate during the gas introduction phase while the heating system prevents temperature from dropping below freezing during the depressurization phase, maintaining high evaporation rates without moisture solidification.