Vacuum Part Replacement Chamber for Semiconductor Consumables

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Solution Overview

Problem

The existing part replacement systems in semiconductor manufacturing require significant processing stop time and increased installation area due to the need to evacuate and manually replace large consumable parts, which hampers throughput and efficiency.

Innovation Solution

A part replacement system comprising a replacement device connected to both the processing device and a part storage device, which moves to the processing device to replace used consumable parts with unused ones stored in the part storage device, reducing the need for manual intervention and evacuation, thereby minimizing processing stop time and installation area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual replacement of consumable parts is performed by opening the processing device to the atmosphere, then the consumable part can be replaced, but the processing stop time increases due to evacuation requirements

Engineering Contradiction:

Improveconsumable part replacementVSAvoidprocessing stop time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The system is divided into a processing device and a separate replacement device that can operate independently. The replacement device includes a replacement chamber that can be evacuated separately from the processing chamber, allowing consumable part replacement without exposing the processing device to atmosphere and avoiding processing stoppage.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A replacement device acts as an intermediary between the processing device and the external environment. This intermediary contains a replacement chamber that serves as a buffer zone, allowing consumable parts to be transferred between the processing device and storage without direct atmospheric exposure to the processing chamber.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If manual replacement of large-sized consumable parts is performed, then the consumable part can be replaced, but the replacement time becomes excessively long

Engineering Contradiction:

Improveconsumable part replacementVSAvoidreplacement duration

Core Design Contradiction:

Ease of operationVSDuration of action of moving object

Solution Approach 1:

The replacement device is equipped with an automated handler that performs the consumable part replacement operations automatically. The handler extracts used consumable parts from the processing device and installs new consumable parts from storage without requiring manual intervention, significantly reducing replacement time.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Manual mechanical operations are replaced with an automated mechanical handler system. The handler uses robotic mechanisms to grasp, move, and install large-sized consumable parts, replacing the slow and labor-intensive manual process with a faster, more efficient automated system.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Loss of time

If a replacement station with vacuum evacuation is used for consumable part replacement, then processing stop time is reduced, but the installation area of the system increases

Engineering Contradiction:

Improveprocessing stop timeVSAvoidsystem installation area

Core Design Contradiction:

Loss of timeVSArea of stationary object

Solution Approach 1:

The replacement device combines multiple functions into a single integrated unit: it includes both the replacement chamber for vacuum operations and storage for multiple consumable parts. This merging eliminates the need for separate replacement stations for each consumable part, reducing the overall installation area while maintaining vacuum protection during replacement operations.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The replacement device is designed as a universal platform that can handle multiple types of consumable parts. The storage section can accommodate different consumable parts, and the handler can be configured to replace various part types, eliminating the need for dedicated replacement stations for each part type and reducing total system footprint.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS11992912B2Part replacement system and part replacement device

Publication Date: 2024.05.28 TOKYO ELECTRON LTD

AI summary

A part replacement system includes a part storage device configured to store an unused consumable part, and a replacement device that is connected to a processing device and the part storage device, the replacement device being configured to replace a used consumable part installed in the processing device with the unused consumable part stored in the part storage device. The replacement device is moved to a position of the processing device having the used consumable part that requires replacement, and the replacement device is connected to the processing device, and the part storage device is moved to a position of the replacement device connected to the processing device having the used consumable part that requires replacement, and the part storage device is connected to the replacement device.