Vacuum Processing Apparatus Segmented Specimen Stage
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Solution Overview
Problem
Vacuum processing apparatuses face challenges in maintaining efficiency due to increased size and weight of components, leading to difficulties in maintenance, non-uniform processing, and prolonged downtime for calibration and cleaning, especially with larger semiconductor wafers.
Innovation Solution
A vacuum processing apparatus design featuring a coaxially symmetrical processing chamber with a dielectric specimen stage, metal base plate, and pin drive unit, allowing for efficient maintenance, uniform processing, and reduced downtime through improved gas flow and component interchangeability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the vacuum processing apparatus is made larger to process larger semiconductor wafers, then the processing capability is improved, but the weight of components increases making maintenance difficult
Solution Approach 1:
The specimen stage assembly is divided into separable components: the specimen stage block and the base plate are designed to be detachably connected. This allows the specimen stage block to be removed independently for maintenance without moving the entire large apparatus, solving the maintenance difficulty while preserving the large processing capability.
Solution Approach 2:
The specimen stage block is extracted as a removable component from the base plate. The removal holes and removal pins enable the specimen stage block to be taken out separately for cleaning and maintenance, allowing maintenance of large apparatus components without moving the entire system.
2Ease of repair
If the inner portion of the processing chamber is kept open for maintenance, then cleaning can be performed, but processing cannot be performed during maintenance
Solution Approach 1:
The specimen stage assembly is segmented into removable specimen stage block and base plate. The specimen stage block can be removed for cleaning while the base plate remains in place, allowing maintenance without fully opening the processing chamber and minimizing processing downtime.
Solution Approach 2:
The specimen stage block is extracted as a separate removable component. This allows cleaning of the specimen stage block in a separate location while the processing chamber remains sealed and operational, enabling concurrent processing and maintenance.
3Strength
If support beams are made larger to support larger wafers, then the load bearing capacity is improved, but the weight increases making manual handling difficult
Solution Approach 1:
The support structure is segmented by making the specimen stage block removable from the base plate. This allows the heavy specimen stage block to be handled separately using appropriate equipment while the base plate remains fixed, maintaining load bearing capacity while enabling manageable maintenance operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances processing efficiency and yield by facilitating rapid maintenance, ensuring uniform surface processing, and reducing the time the apparatus is not operational.
Implementation Method 1
a base member (1306), on an upper surface of which a dielectric film (1307) is formed and on which a specimen (300) is held
Implementation Method 2
a seal member (1207) and a plurality of pins (1302) that pass through the beam part (1301), the base plate (1203), the insulating member (1305), and the base member (1306), support the specimen (300) on tips of the pins (1302) and vertically move the specimen (300)
Data Source
AI summary
Provided is a vacuum processing apparatus that improves an operation rate or efficiency of processing. The vacuum processing apparatus includes: a cylindrical pedestal which is disposed below a base plate that constitutes a specimen stage and is made of a metal, whose internal space is under an atmospheric pressure, and which is connected to the base plate in a state in which the base plate, and a base member and an insulating member fastened to the base plate are placed; a plate-shaped beam part which is disposed in the space of the pedestal with a gap from a lower surface of the base plate, and extends outward from the center of the space in a T or Y shape; a plurality of pins that pass through the beam part, the base plate, the insulating member, and the base member, support the specimen on tips thereof on an upper side of the specimen stage, and vertically move the specimen; a pin drive unit that is mounted on a lower surface of the center of the beam part; and a seal that is disposed around a through-hole through which each of the plurality of pins passes, and airtightly seals the inside and the outside.