Vacuum Pump Active Area Particle Beam Deflection

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Solution Overview

Problem

Existing vacuum systems face challenges in effectively evacuating the jet area, leading to contamination of the analysis beam due to undesirable particles not being properly filtered, which affects the quality of analysis in gas analysis and mass spectrometry systems.

Innovation Solution

The vacuum system guides the particle beam into the active pumping area of the vacuum pump, utilizing the beam's direction and kinetic energy to actively remove undesirable particles, thereby improving evacuation and separation of partial beams, ensuring high-quality analysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a deflection device is used to separate partial beams, then the beam can be divided and directed to analyzer unit, but undesirable particles are not effectively removed and contaminate the analysis beam

Engineering Contradiction:
Improveanalysis qualityVSAvoidparticle contamination
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the harmful second partial beam containing undesirable particles from the main beam path by deflecting it into the vacuum pump's active pumping area. This separates the harmful components (undesirable particles) from the useful components (analysis beam), allowing the harmful particles to be directly pumped away while the clean first partial beam proceeds to the analyzer unit.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The vacuum pump's active pumping area serves as an intermediary region that receives the deflected second partial beam. This intermediary zone allows undesirable particles to be captured and removed from the system before they can contaminate the analysis beam or reach the analyzer unit, acting as a buffer between the deflection device and the analysis chamber.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If static surfaces are used to filter particles, then some separation occurs, but particles desorb from surfaces and re-contaminate the beam

Engineering Contradiction:
Improveparticle removal effectivenessVSAvoidparticle desorption
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces static filtering surfaces with a dynamic active pumping mechanism. Instead of relying on particles adhering to and remaining on static surfaces, the system uses the dynamic pumping action to continuously remove particles from the beam path. The pump actively draws in and removes undesirable particles, preventing the desorption problem that plagues static surface filters.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent replaces the mechanical/static filtering approach (particles landing on and being held by solid surfaces) with a pneumatic/dynamic approach (particles being swept away by the vacuum pump's pumping action). This substitution eliminates the desorption issue inherent in static surface filtering by using continuous gas flow to remove particles before they can adhere to surfaces.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If the jet area is not effectively evacuated, then pump performance is maintained, but evacuation efficiency in the jet area is insufficient

Engineering Contradiction:
Improveevacuation efficiencyVSAvoidparticle density in jet area
Core Design Contradiction:
ProductivityVSQuantity of substance

Solution Approach 1:

The patent introduces a spatial dimension to particle removal by deflecting the second partial beam laterally into the active pumping area of the vacuum pump. Instead of relying on radial pumping from the center, the system uses angular deflection to guide particles into the pump's effective pumping zone, thereby extending the evacuation capability to the jet area where particles are most concentrated.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the evacuation efficiency and analysis accuracy by directly removing dirt particles from the active pumping area, reducing contamination and improving the quality of the analysis beam.

Implementation Method 1

utilizing the beam's direction and kinetic energy to actively remove undesirable particles

Methodology Applied
Scientific EffectKinetic energy:

Implementation Method 2

deflection devices are often used, for example, by means of which the beam can be deflected in such a way that different components of the beam are deflected differently

Methodology Applied
Scientific EffectDeflection:

Data Source

PatentEP3629366B1Vacuum system and vacuum pump
Publication Date: 2022.05.11 PFEIFFER VACUUM TECH AG
  • EP3629366B1 patent drawingFigure 1
  • EP3629366B1 patent drawingFigure 2
  • EP3629366B1 patent drawingFigure 3

AI summary

Vacuum system (20), in particular mass spectrometry system, comprising: a vacuum pump (22) with a pump-active area (34) in which a gas can be conveyed by means of an active pumping element (36), a device for generating a beam (26, 32) of particles to be analyzed, wherein the beam (26, 32) is directed into the pump-active area (34).