A multilayer lid replaces costly vacuum feedthroughs with integrated traces and contacts, simplifying mass spectrometer sealing and assembly.
A snubber-based nanosecond pulser offsets ion-current wafer voltage droop between bipolar plasma pulses to keep the inter-pulse voltage flat.
A droop compensation circuit shapes a negative-slope interval between bipolar high-voltage pulses to offset ion current and keep wafer voltage flat.
Continuous PTR-MS detection uses heated inert tubing, dual ionization paths, and validation to cut TATP fragmentation and false alarms.
Independent voltages on segmented anode tubes steer ions across the cathode surface, reducing focal wear and extending ion pump life.
A vacuum pumping arrangement segments primary and booster pumps to enhance differential pumping capacity across multiple chambers.
Deflecting partial beams into the active pumping area removes particles, preventing contamination of the analysis beam.