Vacuum pump with cooling apparatus
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Solution Overview
Problem
Vacuum pumps in semiconductor manufacturing facilities face challenges in maintaining stable operation and cooling efficiency, particularly under high-heat conditions, which can lead to rapid temperature increases and affect process precision and maintenance costs.
Innovation Solution
A vacuum pump cooling apparatus that circulates oil through the rotor and uses a heat exchange method with cooling water or a Peltier device to regulate temperature, incorporating sensors and a microprocessor for automatic temperature control based on gas flow rate and environmental conditions, ensuring optimal cooling efficiency and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a vacuum pump operates to generate vacuum pressure, then vacuum pressure is produced, but high heat is generated causing rapid temperature increase
Solution Approach 1:
The patent introduces oil as an intermediary cooling medium that circulates through channels in the rotor and stator. This oil absorbs heat generated during vacuum pressure generation and transfers it to a heat exchanger, preventing rapid temperature increase while maintaining continuous operation. The oil acts as a thermal mediator between the pump components and the external cooling system.
Solution Approach 2:
The patent employs a hydraulic cooling system where oil is pumped through the rotor and stator channels under pressure. The oil circulation system includes a pump, channels, and a heat exchanger, utilizing fluid dynamics to continuously remove heat from the vacuum pump components during operation, thereby managing temperature while maintaining power output.
2Stability of the object's composition
If cooling apparatus is added to manage heat, then temperature stability is improved, but device complexity increases
Solution Approach 1:
The patent merges the cooling function directly into the rotor and stator structures by integrating cooling channels within these components. This combination eliminates the need for separate external cooling apparatus, reducing overall device complexity while maintaining effective temperature stability during vacuum pump operation.
Solution Approach 2:
The vacuum pump performs self-cooling by circulating oil through its own rotor and stator channels. The system uses its operational flow (oil circulation) to remove heat generated during operation, enabling the pump to manage its own thermal conditions without requiring complex external cooling infrastructure.
3Temperature
If oil circulation is used for cooling, then cooling efficiency is improved, but energy consumption increases
Solution Approach 1:
The patent implements continuous oil circulation through the rotor and stator channels during vacuum pump operation. This continuous flow ensures constant heat removal, maintaining optimal temperature and cooling efficiency throughout the operational cycle, while the system is designed to minimize energy consumption of the circulation pump.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents rapid temperature increases, enhances operational stability, improves cooling efficiency, and reduces maintenance costs by automatically adjusting oil temperature according to process requirements, thereby increasing productivity and extending equipment lifespan.
Implementation Method 1
a heat exchange method with cooling water or a Peltier device to regulate temperature
Implementation Method 2
a heat exchange method with cooling water or a Peltier device to regulate temperature
Data Source
AI summary
The present invention relates to a technology of efficiently cooling a vacuum pump that produces a vacuum in a process chamber of a semiconductor manufacturing facility. The present invention provides a new type of vacuum pump cooling method that keeps the internal temperature of a vacuum pump at a predetermined level by circulating oil through rotors of the vacuum pump, such that it is possible to prevent a rapid increase in the temperature of the vacuum pump and smoothly lubricate bearings at the early stage of operation, whereby it is possible to ensure stability when performing processes and operating the pump and economically maintain the facility.