Vacuum Robot Hand With Airtight Hollow Space for Sensor Cooling
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Solution Overview
Problem
Heat dissipation and protection of devices in a vacuum environment are inadequate in existing substrate-conveying robots due to the vacuum atmosphere, leading to potential device failure from heat accumulation and exposure to dust or corrosive gases.
Innovation Solution
The robot design includes airtight hollow hand spaces in the first and second hands, allowing devices like sensors to be placed within an atmospheric pressure environment, ensuring effective heat dissipation and protection from dust and corrosive gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a device such as a sensor is arranged in a vacuum atmosphere, then the robot can operate in a vacuum environment, but heat cannot be sufficiently dissipated from the device
Solution Approach 1:
The robot hand is divided into two separate spaces: a vacuum space for robot operation and a non-vacuum (atmospheric pressure) space for housing heat-generating devices. This segmentation allows each space to have optimized conditions for its specific function.
Solution Approach 2:
A partition wall with a heat radiating plate is introduced as an intermediary structure between the vacuum space and the non-vacuum space. The heat radiating plate serves as a thermal interface that enables heat dissipation from devices in the atmospheric pressure space while maintaining the vacuum seal.
2Adaptability or versatility
If a device such as a sensor is arranged in a vacuum atmosphere, then the robot can function in space, but the device may fail due to adhesion of dust or corrosive gas
Solution Approach 1:
The hand structure is segmented into a vacuum-exposed outer space and a protected inner space at atmospheric pressure. This physical separation shields sensitive devices from the harsh vacuum environment, dust, and corrosive gases while allowing the robot to operate in space.
Solution Approach 2:
The non-vacuum space creates an inert atmospheric environment around sensitive devices, protecting them from direct exposure to the harsh vacuum conditions, dust particles, and corrosive gases present in the external environment.
3Ease of operation
If devices are placed in the robot hand, then the robot can perform sensing functions, but heat accumulation occurs in vacuum conditions
Solution Approach 1:
The hand is divided into functional zones: a vacuum space for robot operation and a dedicated non-vacuum space for housing sensors and other heat-generating devices. This allows sensing functions to be maintained while preventing heat accumulation through atmospheric pressure cooling.
Solution Approach 2:
The partition wall with heat radiating plate acts as a thermal mediator, allowing heat to be efficiently radiated from devices in the atmospheric pressure space while maintaining the vacuum seal, thus preventing heat accumulation without compromising sensing capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Devices can be effectively cooled and protected from environmental hazards, maintaining functionality in vacuum conditions.
Implementation Method 1
because a device such as a sensor can be arranged in the airtight hollow hand space, it possible to sufficiently dissipate heat from the device
Implementation Method 2
sufficiently dissipate heat from the device dissimilar to a case in which the device such as a sensor is arranged in a vacuum atmosphere
Data Source
AI summary
A robot includes a robot arm and a hand. The hand includes a first hand and a second hand arranged on or above the first hand. At least one of the first hand and the second hand has an airtight hollow hand space.


