Vacuum Processing Roller Electrode Non-Contact Power
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Solution Overview
Problem
Conventional high-frequency power connection methods in vacuum processing apparatuses, such as rotary connectors, capacitor coupling, and slip rings, face issues like heat generation, dielectric breakdown, and electrode wear, making them unsuitable for continuous operation.
Innovation Solution
A take-up vacuum processing apparatus with a chamber, a rotatable first electrode, a gas supply unit, and a third electrode arranged in a vacuum environment, where an alternating-current voltage is applied non-contactedly to prevent dielectric breakdown and wear, and a cooling mechanism is used to manage heat, ensuring uniform plasma generation and extended electrode life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a rotary connector using mercury is used to connect the rotating can and the high-frequency power source, then electrical connection is achieved, but heat is generated and breakage of the rotary connector occurs
Solution Approach 1:
The invention extracts the high-frequency power supply function from the rotating can assembly and places it in a stationary position. The can roller is no longer connected to the high-frequency power source, eliminating the need for rotary connectors and their associated heat generation and reliability issues.
Solution Approach 2:
The invention introduces a stationary high-frequency power source as an intermediary component that supplies power to the can roller through capacitive coupling without direct electrical connection, thereby avoiding the heat generation and breakage problems of traditional rotary connectors.
2Reliability
If capacitor coupling with opposed flat plates is used under atmospheric pressure, then electrical connection is achieved, but dielectric breakdown occurs at high voltage
Solution Approach 1:
The invention changes the pressure parameter from atmospheric pressure to vacuum pressure in the processing chamber. This parameter change prevents dielectric breakdown by eliminating the breakdown pathway that exists at atmospheric pressure, allowing high-voltage capacitor coupling to operate reliably.
3Reliability
If a slip ring is used to connect the high-frequency power source, then electrical connection is achieved, but heat generation causes breakage and contact wear reduces electrode life
Solution Approach 1:
The invention extracts the high-frequency power supply function from the rotating can assembly and places it in a stationary position. The can roller is no longer connected to the high-frequency power source, eliminating the need for slip rings and their associated heat generation and electrode wear problems.
Solution Approach 2:
The invention replaces the mechanical contact-based slip ring system with a stationary capacitive coupling system. This substitution eliminates mechanical contact and friction, thereby preventing electrode wear and extending operational life.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents breakage and dielectric breakdown, extends the life of electrodes, and ensures uniform plasma generation between the first and second electrodes, improving the reliability and efficiency of the vacuum processing apparatus.
Implementation Method 1
a vacuum pump (not shown) is connected to the connection portion (17) and the inside of the processing chamber (101) is kept in a predetermined degree of vacuum by the vacuum pump
Implementation Method 2
a radio frequency (RF) power source (3) that generates a radio frequency (RF) voltage, and the can roller (13) has a roller electrode (18) to which the generated radio frequency (RF) voltage is applied
Implementation Method 3
plasma processing (for example, RIE (Reactive Ion Etching)) while continuously paying out and taking up a plastic film
Data Source
AI summary
A take-up vacuum processing apparatus includes a chamber, a roller-shaped first electrode rotatably disposed within the chamber, a gas supply unit including a second electrode, and a third electrode. The first electrode causes the flexible processing target to travel by rotating. The third electrode is connected to an alternating-current source and does not contact the first electrode. An alternating-current voltage of the alternating-current source is applied between the third electrode and the first electrode. The chamber includes a divider plate for separating the chamber into a first room in which the second electrode is arranged and a second room in which the third electrode is arranged. Pressures of the first and second rooms are individually adjusted, such that plasma can be generated between the first electrode and the second electrode, and such that anomalous discharge is not generated between the first electrode and the third electrode.