Vacuum Substrate Transfer Robot With Nested Travel Arm Layout
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Solution Overview
Problem
Conventional substrate transfer apparatuses have complex structures that increase manufacturing and operating costs due to the need for additional space within the vacuum chamber, leading to higher installation heights and volumes, which complicates the transfer of substrates in a vacuum environment.
Innovation Solution
A substrate transfer apparatus with a simplified structure, utilizing an elevating robot and a travel robot with a compact design, including a hollow elevating shaft and a travel arm with a speed reducer, to facilitate efficient substrate transfer within the vacuum chamber while maintaining a vacuum-sealed environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional travel robot with complex structure is installed inside the vacuum chamber to move the transfer robot, then the transfer robot can be positioned accurately, but the installation height and volume of the vacuum chamber must be increased
Solution Approach 1:
The travel robot is nested within the hollow elevating shaft, utilizing the internal space of the shaft for robot installation. This allows the robot to be positioned accurately while not increasing the external dimensions or volume of the vacuum chamber, as the robot is contained within the existing shaft structure.
Solution Approach 2:
The travel robot moves along the vertical axis by utilizing the rotational movement of the hollow elevating shaft. When the shaft rotates, the robot positioned inside it moves to different horizontal locations. This transforms a horizontal positioning problem into a vertical rotation problem, achieving accurate positioning without increasing chamber volume.
2Productivity
If a complex travel robot structure is used to transfer substrates in the vacuum chamber, then the transfer capability is improved, but the manufacturing cost increases
Solution Approach 1:
The hollow elevating shaft serves multiple functions: it provides vertical elevation movement, acts as a protective enclosure for the travel robot, and enables horizontal positioning through rotation. This multi-functionality eliminates the need for separate structures for each function, simplifying the overall design and reducing manufacturing cost while maintaining substrate transfer capability.
Solution Approach 2:
The travel robot and the elevating shaft are merged into a single integrated structure where the robot is positioned inside the shaft. This combination reduces the number of separate components and assembly steps, simplifying manufacturing and reducing costs while preserving the robot's transfer capabilities.
3Ease of operation
If the vacuum chamber volume is increased to accommodate the travel robot structure, then the robot can operate freely, but the operating cost for maintaining vacuum state increases
Solution Approach 1:
By nesting the travel robot inside the hollow elevating shaft, the robot operates within the existing shaft volume without requiring additional chamber space. This maintains full operational freedom for the robot while avoiding the need to increase vacuum chamber volume, thereby keeping vacuum maintenance costs unchanged.
4Productivity
If additional structures are installed inside the vacuum chamber to enable robot movement, then the transfer functionality is improved, but particles may be generated compromising the vacuum environment
Solution Approach 1:
The hollow elevating shaft acts as a sealed enclosure for the travel robot, isolating the robot's mechanical components from the vacuum chamber environment. This prevents particle generation from the robot's movement mechanisms while still allowing full transfer functionality, as the shaft itself is part of the vacuum-sealed structure.
Data Source
AI summary
A substrate transfer apparatus that transfers a substrate in a vacuum chamber is provided. The substrate transfer apparatus includes: an elevating robot, a travel robot, and a substrate transfer robot. The travel robot includes: (i) a travel arm, through which a b1-st vertical through-hole and a b2-nd vertical through-hole are formed, wherein an internal slot is formed at inner area of the travel arm than where the b2-nd vertical through-hole is located, wherein the internal slot is separated from the b2-nd vertical through-hole with a partition, wherein a bottom-open-type space that connects the b2-nd vertical through-hole with the internal slot is formed in the travel arm, and wherein an internal wiring hole that connects the b1-st vertical through-hole with the internal slot is formed in the travel arm, (ii) a b-th driving motor installed in the internal slot, and (iii) a b-th speed reducer installed in the b2-nd vertical through-hole.