Vacuum Substrate Transfer Robot With Double Parallel Link Rigidity
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Solution Overview
Problem
Conventional substrate transfer robots experience vibrations and disturbances during substrate transfer, leading to inaccurate control of transfer direction and increased particle generation in vacuum chambers due to thermal expansion and structural deformation.
Innovation Solution
The substrate transfer robot incorporates a double parallel link structure within its transfer link arms, which enhances rigidity and minimizes vibrations. This structure includes a sealed inner space for the driving motor and speed reducer, and a sealed wiring system to prevent exposure to the vacuum environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single parallel link structure is used in the transfer robot arm, then the device complexity is reduced, but thermal expansion causes structural deformation and position drift
Solution Approach 1:
The transfer robot arm is divided into multiple parallel link structures (first parallel link and second parallel link) instead of using a single parallel link. Each parallel link independently supports the end effector, and the multiple links work together to compensate for thermal expansion effects, thereby maintaining transfer position precision while managing structural complexity
Solution Approach 2:
The patent changes the structural parameter from a single parallel link to multiple parallel links. This parameter change increases the system's ability to resist thermal expansion-induced deformation, as the multiple links can distribute and compensate for thermal stresses, maintaining positioning accuracy despite temperature variations
2Object-affected harmful factors
If the end effector is coupled off-center to the transfer arm, then collision avoidance is achieved, but vibrations and disturbances increase
Solution Approach 1:
The patent employs dynamic balancing mechanisms within the multi-parallel link structure to counteract vibrations and disturbances caused by off-center coupling. The multiple parallel links provide distributed support that dynamically compensates for the imbalance, maintaining transfer direction control accuracy while preserving the collision avoidance benefits of off-center positioning
3Area of stationary object
If driving motors and speed reducers are installed inside the transfer link arms, then the installation area efficiency is improved, but thermal expansion and particle generation occur
Solution Approach 1:
The driving motors and speed reducers are extracted from the vacuum chamber environment and installed in locations outside the vacuum chamber. This extraction eliminates the source of particle generation from motors and speed reducers within the vacuum environment, while the transfer link arms maintain their structural functions without these components, thus resolving the conflict between installation area efficiency and particle generation
4Manufacturing precision
If preliminary operations are performed to minimize thermal expansion effects, then transfer precision is maintained, but productivity decreases
Solution Approach 1:
The patent incorporates preliminary design features into the multi-parallel link structure that proactively compensate for thermal expansion during normal operation. The structure is pre-configured with multiple parallel links that inherently resist thermal deformation, eliminating the need for preliminary operational adjustments and maintaining both transfer precision and productivity simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved rigidity of the double parallel link structure reduces vibrations and disturbances, preventing structural deformation due to thermal expansion and enhancing the robot's ability to maintain accurate substrate transfer without preliminary operations, thus increasing throughput and maintaining a clean vacuum environment.
Implementation Method 1
a first transfer link arm, linked to a transfer arm platform and forming a single parallel link 10, is subjected to thermal expansion caused by heat generated from operations of an internal speed reducer and the like
Data Source
AI summary
A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein link connecting members with blades are engaged at front and rear areas of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes, and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms, multiple subordinate link arms and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.