Vacuum Transfer Device Seal Pressure Control
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Solution Overview
Problem
Transfer devices in vacuum environments experience unstable operation due to variations in vacuum level and temperature, leading to fluctuations in sealing pressure and reduced reliability and accuracy.
Innovation Solution
A vacuum seal structure with seal members, a sealing portion containing lubricant, and a pressure adjusting unit, such as a communication passage, to maintain stable pressure and prevent operational instability by releasing lubricant and adjusting pressure within the sealing portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vacuum seal structure with lubricant is used to seal the sliding portion, then sealing performance is improved, but pressure variations due to vacuum level and temperature changes cause unstable operation
Solution Approach 1:
The patent introduces a communication passage that dynamically connects the sealing portion to the atmospheric pressure region, allowing the system to adapt to pressure and temperature variations. This dynamic pressure equalization mechanism enables the sealing portion to maintain stable operation by releasing excess pressure or allowing pressure equalization when conditions change, thus resolving the contradiction between maintaining sealing performance and ensuring operational stability.
Solution Approach 2:
The communication passage acts as an intermediary between the sealing portion and the atmospheric pressure region. It mediates pressure variations by providing a controlled pathway for pressure equalization, preventing direct transmission of vacuum level and temperature-induced pressure changes to the lubricant in the sealing portion, thereby maintaining stable operation while preserving sealing effectiveness.
2Reliability
If sealing pressure is increased to improve sealing reliability, then airtightness is improved, but temperature variations cause pressure fluctuations that reduce transfer accuracy
Solution Approach 1:
The communication passage provides a dynamic pressure regulation mechanism that automatically responds to temperature variations. When temperature increases cause pressure fluctuations, the communication passage allows pressure equalization with the atmospheric region, maintaining consistent sealing pressure and preventing transfer accuracy degradation while preserving airtight sealing.
3Reliability
If the sealing portion is sealed hermetically to maintain lubricant pressure, then sealing effectiveness is improved, but pressure builds up causing operational instability
Solution Approach 1:
The patent extracts the excess pressure from the sealing portion by providing a communication passage that connects to the atmospheric pressure region. This allows the system to release built-up pressure while maintaining the hermetic seal for lubricant containment, thus preventing operational instability caused by pressure accumulation while preserving sealing effectiveness.
Solution Approach 2:
The communication passage serves as an intermediary pressure release pathway that selectively allows pressure equalization without compromising the seal. It mediates between the need for hermetic sealing and the need for pressure stability by providing a controlled escape route for excess pressure while maintaining the sealing function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the reliability and accuracy of the transfer device by reducing temperature dependence and maintaining stable operation, thereby increasing transfer speed and accuracy.
Implementation Method 1
a sealing portion formed by the structure body, the arm, and the seal members, lubricant being sealed in the sealing portion
Data Source
AI summary
A transfer device is disposed in a vacuum transfer chamber. The transfer device includes a structure body having an inner space isolated from the vacuum transfer chamber, an arm that rotates with respect to the structure body, and a vacuum seal structure configured to airtightly seal a sliding portion between the structure body and the arm. Further, the vacuum seal structure includes one or more seal members disposed at the sliding portion; a sealing portion formed by the structure body, the arm, and the seal members, lubricant being sealed in the sealing portion; and a pressure adjusting unit configured to adjust a pressure in the sealing portion.