Variable Resistance Layer Polygonal Contact for Low Break Voltage

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Solution Overview

Problem

Conventional variable resistance nonvolatile memory elements face challenges with increased initial break voltage and variation in characteristics during miniaturization, leading to unstable low-voltage operation.

Innovation Solution

A nonvolatile memory element design featuring a first and second metal oxide variable resistance layer with a flat principal face and specific polygonal contact regions, where the second variable resistance layer contacts both the first variable resistance layer and the second electrode within an interior polygon, allowing for concentrated electric fields without forming a step, thus lowering the initial break voltage and reducing characteristic variations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If a step is formed in the variable resistance element to allow easy formation of an initial filament, then the initial break voltage is lowered, but variation in the characteristics of nonvolatile memory elements becomes obvious during miniaturization

Engineering Contradiction:
Improveinitial break voltageVSAvoidcharacteristic variation
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The invention introduces a bend structure at a specific location within the variable resistance layer, creating a localized region with different geometric properties. This bend structure concentrates the electric field locally, enabling easy filament formation and low initial break voltage, while the rest of the layer maintains uniform characteristics that reduce variation during miniaturization.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention adds a geometric dimension by creating a bend structure in the variable resistance layer. This bend introduces a specific spatial configuration that concentrates electric field lines, providing a reliable mechanism for initial filament formation without affecting the overall layer uniformity and reducing characteristic variation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of moving object

If the variable resistance layer is miniaturized to increase integration density, then the device size is reduced, but the initial break voltage increases and operation becomes unstable

Engineering Contradiction:
Improvedevice sizeVSAvoidinitial break voltage
Core Design Contradiction:
Area of moving objectVSUse of energy by moving object

Solution Approach 1:

By introducing a bend structure at a specific location in the variable resistance layer, the invention creates a localized electric field concentration point. This allows miniaturized devices to maintain low initial break voltage through the localized bend geometry, while the overall device area is reduced for higher integration density.

Inventive Principle:
Principle #3Local quality

3Use of energy by moving object

If a step structure is formed to concentrate electric fields, then the initial break voltage is lowered, but the manufacturing complexity increases

Engineering Contradiction:
Improveinitial break voltageVSAvoidmanufacturing complexity
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The bend structure is formed within the variable resistance layer itself, utilizing the material's own geometry rather than requiring separate step structures or additional processing layers. This approach concentrates electric fields effectively while maintaining relatively simple manufacturing processes.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables stable low-voltage operation with reduced initial break voltage and minimized characteristic variations, even when miniaturized, by concentrating electric fields at specific vertices within the polygonal contact regions, enhancing the reliability of the nonvolatile memory element.

Implementation Method 1

selectively causing the occurrence of oxidation/reduction reaction in an electrode interface which is in contact with a variable resistance layer having a high oxygen content atomic percentage, to stabilize resistance change

Methodology Applied
Scientific EffectOxidation/reduction reaction: Redox Reactions

Implementation Method 2

through electric field concentration, to cause the break phenomenon even with a low voltage, with the bend as a starting point

Methodology Applied
Scientific EffectElectric field concentration: Electric Field

Data Source

PatentUS9172038B2Nonvolatile memory element and method of manufacturing the same
Publication Date: 2015.10.27 PANASONIC SEMICON SOLUTIONS CO LTD
  • US9172038B2 patent drawing
  • US9172038B2 patent drawing
  • US9172038B2 patent drawing

AI summary

A variable resistance layer between a first electrode and a second electrode includes: a first variable resistance layer contacting the first electrode; and a second variable resistance layer contacting the second electrode and having a lower degree of oxygen deficiency than the first variable resistance layer. A principal face of the first variable resistance layer which is close to the second variable resistance layer is flat. The second variable resistance layer is in contact with both the first variable resistance layer and the second electrode in a polygonal region including a vertex inward of an outline of the variable resistance layer and vertices along the outline when seen from a direction perpendicular to the principal face of the variable resistance layer, and is not in contact with at least one of the first variable resistance layer and the second electrode in a region outside the region inside the polygon.