Variable Swath End Effector for Tool-Free Substrate Handling
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Solution Overview
Problem
Existing end effectors for handling semiconductor wafers and substrates require frequent tooling or arm changes to accommodate varying sizes and weights, leading to costly workflow stoppages.
Innovation Solution
A variable swath end effector with adjustable arms using interleaved linear bearing rails and motor-driven movement, allowing for a wide range of substrate handling without tooling changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If arm or tooling changes are made to accommodate varying substrate sizes, then adaptability is improved, but productivity deteriorates due to workflow stoppages
Solution Approach 1:
The end effector employs motor-driven arms with variable positioning capability, allowing the distance between arms to be dynamically adjusted to match different substrate sizes. This dynamic adaptability eliminates the need for physical arm exchanges while maintaining optimal handling configuration for each substrate type.
Solution Approach 2:
The end effector design integrates multiple functions within a single device: it can handle various substrate sizes (50mm to 300mm), perform precise positioning, and provide stable transport. The universal design eliminates the need for multiple specialized arms or tooling sets, allowing one end effector to replace many specialized components.
2Device complexity
If fixed-width arms are used, then device complexity is reduced, but adaptability deteriorates when handling various substrate sizes
Solution Approach 1:
The arms incorporate motor-driven adjustment mechanisms that enable variable width configuration. This dynamic capability allows the end effector to adapt to different substrate sizes without requiring multiple fixed-width arm sets, resolving the contradiction between simplicity and adaptability.
3Adaptability or versatility
If variable-width arms are implemented, then adaptability is improved, but device complexity increases due to additional adjustment mechanisms
Solution Approach 1:
The patent replaces complex mechanical adjustment mechanisms with motor-driven systems. This substitution simplifies the overall structure by eliminating manual adjustment components while providing precise, programmable control over arm positioning and width configuration.
Solution Approach 2:
The end effector utilizes programmable parameter changes in arm positioning and width configuration. By controlling motor parameters rather than physical mechanical adjustments, the system achieves variable width capability with reduced mechanical complexity and improved precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient handling of substrates from 50mm to 300mm without stopping the machine, reducing costs and improving throughput by eliminating the need for frequent arm or tooling changes.
Implementation Method 1
adjustable arms using interleaved linear bearing rails
Data Source
Figure 1
Figure 2A~2B
Figure 2C
AI summary
An apparatus, system and method for providing a variable swath end effector. The variable swath end effector may include: two arms, each for retaining a portion of a retained element; two pairs of bearing rails, each pair being uniquely mechanically associated with a one of the two arms, wherein a level of one pair of bearing rails is staggered from a second level of the other pair of bearing rails in a perpendicular axis, and wherein the staggered pairs of bearing rails are interleaved with each other; and a motor capable of driving a belt in mechanical association with each of the two arms, wherein actuation of the motor drives the belt to synchronously move each of the two arms across a respective one of the pairs of bearing rails to vary the swath between the two arms.