Vertical CBRAM Stack Sidewall Profile for Leakage Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current crossbar arrays with conductive bridge random access memory (CBRAM) devices face challenges in minimizing leakage currents and power consumption due to half-select errors, which limit the size and efficiency of the arrays, especially during parallel operations and stochastic weight updates.

Innovation Solution

The formation of a vertical stack comprising a CBRAM device and an access device connected in series, utilizing subtractive etching to create a sidewall profile that increases in width from the bottom to the top, which helps in minimizing half-select errors by optimizing the voltage window and reducing leakage currents through the selection of appropriate materials for the CBRAM and access devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional crossbar arrays with CBRAM devices are used, then the array size can be increased, but leakage currents and power consumption increase due to half-select errors

Engineering Contradiction:
Improvearray sizeVSAvoidpower consumption
Core Design Contradiction:
Quantity of substanceVSLoss of energy

Solution Approach 1:

The crossbar array is segmented into multiple layers with alternating conductive bridge random access memory (CBRAM) and access device layers. This segmentation allows for better control of leakage currents by dividing the array into manageable units with independent selection capabilities, reducing the impact of half-select errors on overall power consumption.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Access devices are introduced as intermediary elements between the row and column wires in the crossbar array. These access devices act as mediators that control current flow more precisely, enabling selective activation of CBRAM cells and minimizing leakage currents through unselected cells during parallel operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Quantity of substance

If conventional crossbar arrays with CBRAM devices are used, then the array size can be increased, but half-select errors increase limiting efficiency

Engineering Contradiction:
Improvearray sizeVSAvoidhalf-select error rate
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The array is divided into multiple layers with alternating CBRAM and access device structures. This segmentation enables more precise cell selection by requiring simultaneous activation of specific row and column lines within each layer, thereby reducing half-select errors and improving reliability as array size increases.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Access devices serve as intermediary control elements that enhance selection precision. By introducing these additional control points, the system can more accurately select target cells while preventing unintended activation of neighboring cells, thus reducing half-select errors in larger arrays.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Loss of energy

If vertical stacks with subtractive etching are used, then leakage currents are minimized, but manufacturing complexity increases

Engineering Contradiction:
Improveleakage currentVSAvoidmanufacturing process complexity
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The manufacturing process employs periodic alternation of CBRAM and access device layer formations through repeated cycles of depositing and etching. This periodic action, implemented via subtractive etching, creates the vertical stack structure with alternating layers, enabling effective leakage current minimization while organizing the complex manufacturing steps into manageable periodic cycles.

Inventive Principle:
Principle #19Periodic action

Data Source

PatentUS20230200269A1Stacked conductive bridge random access memory and access devices
Publication Date: 2023.06.22 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US20230200269A1 patent drawing
  • US20230200269A1 patent drawing
  • US20230200269A1 patent drawing

AI summary

A semiconductor structure comprises a conductive bridge random access memory device and an access device connected in series with the conductive bridge random access memory device. The conductive bridge random access memory device and the access device are arranged in a vertical stack. The vertical stack has a sidewall profile that increases in width from a bottom surface of the vertical stack to a top surface of the vertical stack.