Dual-Gated Vertical Fe-FETs for Non-Volatile CAM Scaling

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Solution Overview

Problem

As semiconductor memory technologies shrink in process geometry, they face design and process challenges that affect the efficiency and cost-effectiveness of non-volatile memory devices, particularly in scaling down content addressable memory (CAM) cells and arrays with vertical transistors.

Innovation Solution

The development of non-volatile CAM storage systems utilizing vertical single-transistor (1T) CAM memory elements and monolithic three-dimensional memory arrays with dual-gated vertical ferroelectric field-effect transistors (Fe-FETs) that include a ferroelectric gate oxide material, allowing for efficient data storage and retrieval through independent control of polarization states and threshold voltages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If process geometries are shrunk to reduce cost per bit, then cost per bit is reduced, but design and process challenges increase

Engineering Contradiction:
Improvecost per bitVSAvoiddesign and process challenges
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent transitions from planar 2D memory cell layouts to vertical 3D transistor structures. The vertical transistor extends in the vertical dimension with source and drain regions at different heights, allowing memory cells to be stacked vertically. This dimensional change increases storage density without further shrinking lateral process geometries, thereby reducing cost per bit while avoiding the associated scaling challenges.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs dual-gated vertical transistors where the threshold voltage can be dynamically adjusted by applying voltages to two independent gates. This parameter control allows optimization of device performance and memory cell operation without requiring further geometric scaling. The ability to tune threshold voltages independently enables precise control over read/write operations and match line sensing, resolving design challenges associated with scaled geometries.

Inventive Principle:
Principle #35Parameter changes

2Quantity of substance

If vertical transistors are used in CAM cells, then storage density is increased, but device complexity increases

Engineering Contradiction:
Improvestorage densityVSAvoidvertical transistor structure
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The vertical transistor structure performs multiple functions within a single device: data storage in the channel region, threshold voltage control through dual gates, and integration with match line sensing circuitry. The source and drain regions serve both as charge storage elements and as connection points for bit line and complement bit line. This multi-functionality increases storage density while managing device complexity by consolidating functions rather than adding separate components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The vertical transistor is segmented into distinct functional regions: source region, channel region, drain region, and two gate regions. Each segment performs a specific function - the source and drain store charge, the channel conducts current, and the gates control threshold voltage. This segmentation allows independent optimization of each region and simplifies the overall device design by dividing complex functionality into manageable, specialized components.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient data storage and retrieval in a compact, scalable format, addressing the challenges of shrinking process geometries and improving the performance and cost-effectiveness of non-volatile memory devices by utilizing dual-gated vertical Fe-FETs in three-dimensional memory arrays.

Implementation Method 1

vertical single-transistor (1T) CAM memory elements and monolithic three-dimensional memory arrays with dual-gated vertical ferroelectric field-effect transistors (Fe-FETs) that include a ferroelectric gate oxide material

Methodology Applied
Scientific EffectFerroelectricity:

Data Source

PatentUS10453531B1Content addressable memory using threshold-adjustable vertical transistors and methods of forming the same
Publication Date: 2019.10.22 SANDISK TECHNOLOGIES LLC
  • US10453531B1 patent drawing
  • US10453531B1 patent drawing
  • US10453531B1 patent drawing

AI summary

A content addressable memory element is provided that includes a vertical transistor including a first electrode coupled to a match line, a second electrode coupled to a ground line, a first gate electrode coupled to a search line, and a second gate electrode coupled to a complementary search line. The first gate electrode and the second gate electrode are disposed on opposite sides of the vertical transistor, and the vertical transistor includes a charge storage memory element.