Vertical Galvanic Deposition Device with Segmented Anode
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Solution Overview
Problem
Current galvanic metal deposition systems, particularly for vertical deposition, require significant manpower and time for maintenance and system shutdowns, leading to inefficiencies and high costs due to complex device configurations and the need for extensive manual handling.
Innovation Solution
A device and container system for vertical galvanic metal deposition, featuring a compact design with a firmly connected anode and carrier element, optimized conduit alignment, and detachable electrical connections, allowing for efficient electrolyte flow and reduced device size, enabling easier maintenance and operation without full system shutdowns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a complex device configuration is used for vertical galvanic metal deposition, then deposition uniformity and control are improved, but maintenance complexity and system downtime increase
Solution Approach 1:
The device is divided into separate functional modules: anode elements with through-going conduits, carrier elements, and substrate holders. These segments can be independently maintained or replaced without shutting down the entire system, reducing maintenance complexity while preserving deposition uniformity through controlled electrolyte flow paths.
Solution Approach 2:
The device incorporates detachable connections and movable components that allow dynamic reconfiguration during operation. The anode elements can be independently accessed and maintained while the system continues to function, transforming a static complex system into a dynamically maintainable one.
2Reliability
If traditional electroplating systems are used, then metal deposition capability is achieved, but system maintenance requires full shutdown and extensive manpower
Solution Approach 1:
The electroplating system is segmented into independently maintainable components including separate anode elements, carrier elements, and substrate holders. This allows maintenance personnel to service individual components without shutting down the entire system, maintaining deposition capability while improving system availability.
Solution Approach 2:
The through-going conduits in the anode elements enable self-contained electrolyte circulation and maintenance. The system can be maintained in-place without requiring external intervention for complete system shutdown, allowing continuous or rapid resumption of metal deposition operations.
3Ease of repair
If extensive manual handling is required for device maintenance, then system components can be serviced, but time consumption and costs increase
Solution Approach 1:
The device is configured with modular segments (anode elements, carrier elements, substrate holders) that can be individually serviced. The detachable connections and through-going conduits enable maintenance personnel to access and service components without disassembling the entire system, reducing both ease of repair requirements and maintenance time.
Solution Approach 2:
The through-going conduits provide vertical access paths through the anode elements, allowing maintenance operations to be performed from different spatial dimensions. This enables servicing of internal components without extensive manual handling from external access points, reducing maintenance time while preserving serviceability.
4Manufacturing precision
If a larger device setup is used, then deposition control and uniformity are achieved, but system size and handling complexity increase
Solution Approach 1:
The deposition system is divided into multiple smaller functional segments (anode elements with conduits, carrier elements, substrate holders) that can be arranged in a compact configuration. This modular approach achieves the necessary deposition control and uniformity through controlled electrolyte flow distribution while reducing the overall device volume and handling complexity compared to a monolithic design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system ensures uniform metal deposition with reduced manpower and time requirements, minimizing system downtime and costs by allowing for quick maintenance and operation within a smaller, more efficient setup.
Implementation Method 1
vertical galvanic metal, preferably copper, deposition on a substrate
Implementation Method 2
galvanic metal deposition
Implementation Method 3
at least one through-going conduit extending through the at least first anode element and the at least first carrier element
Data Source
AI summary
The present invention is related to a device for vertical galvanic metal, preferably copper, deposition on a substrate, a container suitable for receiving such a device and a substrate holder, which is suitable for receiving a substrate to be treated, and the use of such a device inside of such a container for galvanic metal, in particular copper, deposition on a substrate.