Vertical Interconnect Semiconductor Packaging for Compact Reliability

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Solution Overview

Problem

Conventional semiconductor packages face issues of high cost, decreased reliability, and large package sizes, leading to suboptimal performance.

Innovation Solution

The proposed solution involves a semiconductor device structure comprising a first substrate with a conductive structure, a second substrate with a conductive structure, a vertical interconnect coupling both substrates, and an encapsulant covering the interconnect, with exposed ports for communication, along with a method of manufacturing that includes attaching electronic components and forming encapsulants to secure and protect the interconnects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional semiconductor packages are used, then manufacturing cost is reduced, but reliability decreases and package size increases

Engineering Contradiction:
Improvedevice reliabilityVSAvoidpackage size
Core Design Contradiction:
ReliabilityVSVolume of stationary object

Solution Approach 1:

The patent transitions from conventional lateral interconnect arrangements to vertical interconnect structures, utilizing the third dimension (vertical axis) to reduce the lateral footprint of the package. This dimensional change allows for higher density interconnections without increasing package area, thereby improving reliability while maintaining compact size.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a stacked architecture where multiple substrates and electronic components are vertically nested within a compact enclosure. The first substrate, second substrate, and various components are arranged in layers, with the encapsulant nesting all elements within a small volume, achieving high integration density without increasing package footprint.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If conventional semiconductor packages are used, then manufacturing cost is reduced, but performance decreases

Engineering Contradiction:
Improvedevice reliabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent employs preliminary formation of conductive structures and interconnects on substrates before final assembly. The conductive structures are pre-formed on the first and second substrates, and the encapsulant is prepared in advance, enabling more efficient assembly processes that reduce manufacturing complexity and cost despite the advanced package architecture.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The encapsulant serves multiple functions simultaneously: it provides mechanical support, environmental protection, electrical insulation, and structural integration for the vertical interconnect structure. This multi-functionality reduces the need for additional separate components, simplifying manufacturing and reducing overall cost.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Volume of stationary object

If package size is reduced, then device integration is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvepackage sizeVSAvoidstructural complexity
Core Design Contradiction:
Volume of stationary objectVSDevice complexity

Solution Approach 1:

The patent divides the semiconductor device into distinct functional segments: first substrate with conductive structure, second substrate with conductive structure, vertical interconnect layer, and encapsulant. This segmentation allows each component to be optimized and manufactured separately using standard processes, reducing overall manufacturing complexity despite the compact integrated structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent merges multiple functions into the encapsulant material, which simultaneously provides structural support, environmental sealing, electrical insulation, and mechanical protection for the vertical interconnect. This consolidation reduces the number of separate manufacturing steps and components, simplifying production while achieving compact packaging.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11996369B2Semiconductor devices and methods of manufacturing semiconductor devices
Publication Date: 2024.05.28 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US11996369B2 patent drawing
  • US11996369B2 patent drawing
  • US11996369B2 patent drawing

AI summary

In one example, an electronic device, comprises a first substrate comprising a first conductive structure, a second substrate comprising a second conductive structure, wherein the first substrate is over the second substrate, a first electronic component between the first substrate and the second substrate, a vertical interconnect between the first substrate and the second substrate, wherein the vertical interconnect is coupled with the first conductive structure and the second conductive structure, and an encapsulant between the first substrate and the second substrate and covering the vertical interconnect. A vertical port on the first electronic component is exposed by an aperture of the first substrate. Other examples and related methods are also disclosed herein.