Vertical Interconnect Packaging for Thick-Die Thermal Performance

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Solution Overview

Problem

Existing electronic packages and manufacturing methods are inadequate, leading to excess cost, decreased reliability, and relatively low performance with large package sizes.

Innovation Solution

The use of tall and narrow vertical interconnect structures between upper and lower substrates, incorporating conductive bodies such as copper core balls and wires, to support a thick-cavity interposer, which allows for increased die thickness and improved thermal performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional electronic packages are used, then manufacturing is simpler, but reliability decreases and performance is reduced

Engineering Contradiction:
ImprovereliabilityVSAvoidpackage complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The package is divided into multiple substrates (first substrate, second substrate, intermediate substrate) with distinct functional layers. Each substrate can be manufactured and tested independently, then assembled together, improving overall reliability while managing complexity through modular construction

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements a nested structure where the intermediate substrate is positioned between the first and second substrates, creating a layered configuration. The encapsulant material is nested around the vertical interconnect structures and electronic components, providing protection while maintaining a compact hierarchical arrangement that enhances reliability

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If conventional packages are used, then manufacturing cost is lower, but performance is relatively low

Engineering Contradiction:
ImproveperformanceVSAvoidmanufacturing ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent transitions from conventional planar interconnect structures to three-dimensional vertical interconnect structures with height greater than width. This vertical dimension enables shorter signal paths and improved electrical performance while accommodating higher density, achieving superior performance without proportionally increasing manufacturing difficulty

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the geometric parameters of interconnect structures by establishing that height is greater than width, creating tall narrow vertical structures. This parameter change optimizes electrical performance and thermal management while the standardized manufacturing process for these structures maintains ease of production

Inventive Principle:
Principle #35Parameter changes

3Temperature

If die thickness is increased for better thermal performance, then thermal performance improves, but package size increases

Engineering Contradiction:
Improvethermal performanceVSAvoidpackage size
Core Design Contradiction:
TemperatureVSVolume of moving object

Solution Approach 1:

The patent applies different material properties and structural characteristics to different regions of the package. The intermediate substrate and encapsulant materials are specifically selected and configured to provide enhanced thermal management in critical areas, allowing thick dies to be used for thermal performance without proportionally increasing overall package volume

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The encapsulant material is nested around the vertical interconnect structures and electronic components in a space-efficient configuration. This nested arrangement protects the thick dies and vertical structures while minimizing the external package dimensions, achieving compact size despite increased die thickness for thermal performance

Inventive Principle:
Principle #7Nested doll (Nesting)

4Manufacturing precision

If pitch density is reduced, then manufacturing precision requirements decrease, but device performance may be affected

Engineering Contradiction:
Improvepitch densityVSAvoiddevice performance
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent moves interconnect structures into the vertical dimension, creating tall narrow structures that extend perpendicular to the substrate planes. This vertical arrangement reduces the horizontal pitch density requirements while maintaining electrical performance, as the vertical height provides the necessary interconnect length without increasing lateral spacing

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent fundamentally changes the interconnect geometry by making height greater than width, creating vertical structures rather than horizontal traces. This parameter change allows for reduced pitch density in the manufacturing process while maintaining or improving device performance through the optimized vertical interconnect path

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20260076275A1Electronic devices and methods of manufacturing electronic devices
Publication Date: 2026.03.12 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US20260076275A1 patent drawing
  • US20260076275A1 patent drawing
  • US20260076275A1 patent drawing

AI summary

In one example, an electronic device includes a first substrate, an electronic component coupled to a side of the first substrate, and a vertical interconnect structure coupled to the side of the first substrate. The vertical interconnect structure includes a first interconnect structure coupled to the side of the first substrate, and an intermediate substrate having a first side coupled to the first interconnect structure. The intermediate substrate comprises inner sidewalls defining a cavity with the electronic component extending through the cavity. A second interconnect structure can be coupled to a second side of the intermediate substrate opposite the first side of the intermediate substrate. An encapsulant can be disposed over the first substrate and the intermediate substrate, around the electronic component, around the first interconnect structure, around the second interconnect structure, and around the intermediate substrate. Other examples and related methods are also disclosed herein.