Vertical Micro-LED Fabrication via Sapphire Substrate Light Extraction

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Solution Overview

Problem

Current micro-LED technologies face challenges with the complexity and cost of manufacturing, particularly with lateral micro-LEDs requiring multiple epitaxy etching steps and vertical micro-LEDs having complicated fabrication processes and yield issues due to the need for transferring and thinning.

Innovation Solution

A micro-LED device with a vertical structure on a growth substrate, featuring a first type electrode on top and a second type electrode on the side surface of each micro-LED, which simplifies fabrication and improves thermal performance by allowing direct light emission through a sapphire substrate, and can include a dielectric layer for improved light efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If lateral micro-LED structure is used, then manufacturing process is simplified, but device size increases and resolution decreases

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoiddevice size
Core Design Contradiction:
Ease of manufactureVSLength of moving object

Solution Approach 1:

The patent inverts the conventional lateral micro-LED structure by adopting a vertical configuration where the current flows perpendicular to the substrate surface. This inversion allows the micro-LED to achieve smaller footprint dimensions while maintaining manufacturing feasibility through standard epitaxial growth processes on sapphire substrates.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent transitions from a two-dimensional lateral structure to a three-dimensional vertical structure. By utilizing the vertical dimension for current flow and light emission, the device achieves higher density integration and improved resolution without compromising manufacturing simplicity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Length of moving object

If vertical micro-LED structure is used, then device size is reduced and resolution is improved, but manufacturing process becomes complicated with multiple steps

Engineering Contradiction:
Improvedevice sizeVSAvoidfabrication process complexity
Core Design Contradiction:
Length of moving objectVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the complex substrate transfer and thinning steps from the conventional vertical micro-LED fabrication process. By keeping the micro-LED structure on the original sapphire growth substrate, the patent removes the need for delicate transfer operations and substrate thinning, significantly simplifying the manufacturing process.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The sapphire substrate serves multiple functions simultaneously: it acts as the growth substrate for epitaxial formation, provides mechanical support, and enables direct light extraction. This self-service approach eliminates the need for separate transfer substrates and complex assembly steps.

Inventive Principle:
Principle #25Self-service

3Ease of operation

If substrate transfer is performed for vertical micro-LED, then electrode formation is enabled, but fabrication complexity increases and yield decreases

Engineering Contradiction:
Improveelectrode formation capabilityVSAvoidmanufacturing yield
Core Design Contradiction:
Ease of operationVSProductivity

Solution Approach 1:

The sapphire substrate is designed to serve multiple functions: as the epitaxial growth substrate, as the mechanical support structure, and as the light extraction medium. The patent forms both P-type and N-type electrodes directly on the vertical micro-LED structure while it remains on the sapphire substrate, enabling complete device functionality without transfer operations.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent converts the potential disadvantage of having a thick sapphire substrate into an advantage by utilizing it for direct light extraction. The substrate's thickness, which would normally require thinning in conventional approaches, becomes beneficial for mechanical strength and optical performance simultaneously.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

4Illumination intensity

If conventional vertical micro-LED fabrication is used, then light emission is achieved, but thermal performance is poor due to complex multi-step process

Engineering Contradiction:
Improvelight emissionVSAvoidthermal performance
Core Design Contradiction:
Illumination intensityVSTemperature

Solution Approach 1:

The patent segments the heat dissipation pathways by providing multiple thermal conduction routes: through the sapphire substrate and through the electrode structures. The vertical configuration enables direct thermal coupling with the substrate, improving heat sinking efficiency compared to lateral structures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs an asymmetric vertical structure where the heat dissipation path is optimized independently from the light emission path. The bottom surface of the sapphire substrate serves as the primary heat sinking interface, while the top surface enables efficient light extraction, creating asymmetric functional optimization.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution simplifies the fabrication process, reduces the size of micro-LEDs, enhances thermal performance, and improves light emitting efficiency by eliminating the need for substrate transfer and allowing direct light emission, while maintaining or improving resolution.

Implementation Method 1

a plurality of vertical micro-LEDs formed on the growth substrate... the vertical micro-LEDs output light via the growth substrate

Methodology Applied
Scientific EffectLight Emitting Diode: Light Emitting Diode

Implementation Method 2

a micro-LED is formed on a growth substrate through epitaxy growth

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Implementation Method 3

a dielectric layer is formed on surface of the vertical micro-LEDs, and the dielectric layer is a Distributed Bragg Reflector

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11205677B2Micro-LED device, display apparatus and method for manufacturing a micro-LED device
Publication Date: 2021.12.21 GOERTEK INC
  • US11205677B2 patent drawing
  • US11205677B2 patent drawing
  • US11205677B2 patent drawing

AI summary

A micro-LED device, a display apparatus and a method for manufacturing a micro-LED device are provided. The micro-LED device comprises: a growth substrate; a plurality of vertical micro-LEDs formed on the growth substrate; a first type electrode formed on top of each of the vertical micro-LEDs; and a second type electrode formed on side surface of each of the vertical micro-LEDs.