Vertical Plating System With Dual Clamping Gripper
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current plating systems for semiconductor and printed circuit board production face challenges in achieving precise metal structure formation due to irregular contours, short-circuits, and insufficient uniformity of metal layers, especially with miniaturization, leading to impaired electric characteristics and rejected circuits.
Innovation Solution
A vertical plating treatment system with a gripping device that retains work pieces in vertical orientation during transport and treatment, using dual clamping devices to grip and position them precisely, minimizing contact with clamping devices and exposure to treatment fluids, and employing a transport system that maintains cleanliness and reduces bath entrainment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional horizontal plating systems are used, then existing production capacity is maintained, but manufacturing precision and uniformity of metal layers deteriorate due to irregular contours and short-circuits in miniaturized structures
Solution Approach 1:
The patent inverts the conventional horizontal plating approach by implementing a vertical plating system where work pieces are held vertically during treatment. This inversion allows gravity to assist in uniform fluid distribution and eliminates contour irregularities that cause short-circuits in miniaturized structures, directly improving metal layer uniformity while maintaining manufacturing feasibility
Solution Approach 2:
The patent transitions from horizontal to vertical orientation, adding a dimensional change to the plating process. This vertical configuration enables better fluid dynamics and more uniform treatment of miniaturized structures, achieving the required manufacturing precision without excessive system complexity
2Duration of action of stationary object
If work pieces are conveyed horizontally through treatment baths, then transport is simple, but bath entrainment increases and bath service life decreases
Solution Approach 1:
The patent inverts the conventional horizontal transport method by conveying work pieces vertically through treatment baths. This vertical conveyance minimizes the surface area of work pieces exposed to bath fluids, significantly reducing bath entrainment and extending bath service life while maintaining efficient transport
Solution Approach 2:
The patent extracts the work pieces from horizontal transport through baths and repositions them in vertical orientation for treatment. This extraction from the conventional transport path eliminates excessive bath contact, reducing substance loss and extending bath durability
3Manufacturing precision
If miniaturized structures with dimensions of 25 μm or smaller are produced using conventional methods, then production volume can be maintained, but manufacturing precision deteriorates due to irregular contours and short-circuits
Solution Approach 1:
The patent inverts the treatment orientation to vertical, which eliminates contour irregularities and short-circuits in miniaturized structures. This inversion ensures uniform treatment of 25 μm or smaller features while maintaining high production volume through efficient vertical processing
Solution Approach 2:
The patent changes the fundamental parameter of work piece orientation from horizontal to vertical. This parameter change fundamentally improves the treatment of miniaturized structures, achieving the required precision for 25 μm or smaller dimensions without sacrificing production volume
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves reproducible and precise metal structure formation, reduces variations in treatment conditions, and allows for cost-effective high-volume production while maintaining cleanliness and extending bath service life, ensuring uniform treatment and minimizing defects.
Implementation Method 1
a gripping device (10) for retaining a work piece (W) in a vertical orientation during transport and treatment
Data Source
Figure 1~2
Figure 1A~11
Figure 3~4E
AI summary
The present invention relates to a vertical system for the plating treatment of a work piece (W), the said system including at least two treatment modules (100) and at least one transport device for conveying at least one work piece (W) to a treatment module (100) and for transferring the work piece (W) to retaining devices (130) in the treatment module (100). The retaining devices (130) for the work piece (W) are provided in the treatment modules (100). The transport device includes at least one gripping device (10) retaining the work piece (W) each with at least one fastening device (20, 30). Each fastening device (20, 30) includes first clamping devices (25, 35) that are each associated with one side of the work piece (W) and second clamping devices (26). At least one first clamping device (25, 35) associated with a first side of the work piece (W) is designed and disposed such that the position of the first side of the work piece (W) can be defined by the first clamping device (25, 35). At least one second clamping device (26) associated with a second side of the work piece (W) is designed and disposed such that a clamping force can be exerted onto the work piece (W) by the said clamping device. Both the first clamping device (25, 35) and the second clamping device (26) are moveable. According to the invention, the gripping device (10) is actuated as follows: a) moving the first clamping device (25, 35) such that the first clamping device (25, 35) takes over a contact position and thereby the position of the first side of the work piece (W) is defined, and b) moving the second clamping device (26) such that the second clamping device (26) takes over a clamping position and the work piece (W) is thereby clamped together with the at least one first clamping device (25, 35). In doing so the first clamping device (25, 35) takes over the contact position before the second clamping device (26) takes the clamping position.