Vertical Galvanic Substrate Holder with Dual Sealing

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Solution Overview

Problem

There is a need for substrate holders that can simultaneously coat both sides of a substrate during galvanic metal deposition, ensuring uniform metal deposition while preventing the passage of treatment liquids, and allowing for easy attachment and detachment of substrates.

Innovation Solution

A substrate holder comprising two parts with inner metal and outer non-metallic components, featuring hanging elements for container connection, sealing elements to prevent liquid passage, fastening systems for secure attachment, and contact elements for uniform current distribution, ensuring both sides can be coated efficiently and uniformly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a substrate holder is designed to coat both sides of a substrate simultaneously, then productivity is improved, but device complexity increases due to the need for multiple sealing elements and contact elements

Engineering Contradiction:
Improvecoating speedVSAvoidholder structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The substrate holder is divided into two separate substrate holder parts, each capable of holding and coating one side of the substrate. This segmentation allows simultaneous processing of both sides while keeping each individual holder part relatively simple in structure, resolving the contradiction between productivity improvement and device complexity increase.

Inventive Principle:
Principle #1Segmentation

2Reliability

If sealing elements are added to prevent liquid passage, then reliability is improved, but device complexity increases

Engineering Contradiction:
Improvesealing performanceVSAvoidholder structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The sealing function is merged into the substrate holder parts themselves through integrated sealing elements, rather than being a separate additional component. This integration ensures reliable prevention of treatment liquid passage while minimizing the increase in overall device complexity by combining multiple functions into unified structures.

Inventive Principle:
Principle #5Merging (Combining)

3Ease of operation

If a fastening system is implemented for automatic attachment, then ease of operation is improved, but device complexity increases

Engineering Contradiction:
Improvesubstrate handlingVSAvoidholder structure
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The fastening system is designed to enable automatic or semi-automatic attachment and detachment of substrates without requiring complex manual operations. The system serves itself by providing intuitive alignment and securing mechanisms that reduce the skill level and time required for operation, improving ease of use while keeping the added complexity manageable.

Inventive Principle:
Principle #25Self-service

4Manufacturing precision

If contact elements are distributed for uniform current flow, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improvedeposition uniformityVSAvoidholder structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

Contact elements are strategically distributed at specific locations on the substrate holder parts to ensure uniform current flow and metal deposition across the substrate surface. This localized placement of contact elements achieves high manufacturing precision for deposition uniformity while avoiding the need for complex uniform distributions across the entire holder structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The substrate holder enables simultaneous and uniform metal deposition on both sides of a substrate, preventing liquid ingress and allowing for easy substrate handling, thereby enhancing the efficiency and quality of the galvanic metal deposition process.

Implementation Method 1

at least one first contact element in each substrate holder part for forwarding current from an outer source through the hanging element to the at least second contact element

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

substrate holder for vertical galvanic metal, preferably copper, deposition on a substrate to be treated

Methodology Applied
Scientific EffectGalvanic deposition: Electrodeposition

Data Source

PatentUS10407793B2Substrate holder for vertical galvanic metal deposition
Publication Date: 2019.09.10 ATOTECH DEUT GMBH & CO KG
  • US10407793B2 patent drawing
  • US10407793B2 patent drawing
  • US10407793B2 patent drawing

AI summary

A substrate holder for vertical galvanic metal deposition on a substrate, comprising a first substrate holder part and a second substrate holder part, wherein both said parts comprise an inner metal comprising part and an outer non-metallic part in which the substrate holder further comprises a hanging element in each substrate holder part, a first sealing element in each substrate holder part, a second sealing element between the inner metal comprising part and the outer non-metallic part of the substrate holder, a fastening system for detachably fastening both substrate holder parts to each other, a first contact element in each substrate holder part for forwarding current from an outer source through the hanging element to the at least second contact element, and a second contact element in each substrate holder part for forwarding current from the at least first contact element to the substrate to be treated.