Vertical Substrate Processing System Architecture

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Solution Overview

Problem

Current substrate processing systems fail to combine static and pass-by processing in a single linear system, leading to inefficiencies in footprint reduction and processing speed, while requiring significant space and maintenance in high-tech clean rooms.

Innovation Solution

A substrate processing system with a combination of static and pass-by processing chambers, where substrates are processed vertically within a single chamber body machined from a block of metal, utilizing independent wheels for transport at different speeds to enable continuous processing without leaving the vacuum environment, and a method that synchronizes carrier motion to minimize idle time across chambers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If static processing is used, then processing precision is improved, but productivity deteriorates due to idle time between substrates

Engineering Contradiction:

Improveprocessing precisionVSAvoidproductivity

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The system maintains continuous operation by having multiple substrate carriers in different processing stages simultaneously. While one carrier undergoes static processing, another is being transported, and a third is being loaded, eliminating idle time and ensuring continuous useful action across the system.

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The system performs preliminary actions by pre-positioning multiple carriers in different chambers before processing begins. Carriers are loaded and positioned in advance, allowing the system to maintain continuous operation without waiting for individual processing cycles to complete before starting the next one.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If pass-by processing is used, then productivity is improved, but manufacturing precision deteriorates due to motion during processing

Engineering Contradiction:

Improveprocessing speedVSAvoiduniformity of processing

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The system dynamically adjusts carrier motion based on processing requirements. During pass-by processing, carriers move at controlled speeds through coating chambers to ensure uniform deposition. During static processing in annealing chambers, carriers are held stationary to maintain processing precision. The system transitions between static and dynamic states as needed.

Inventive Principle:

Principle #15Dynamics

3Adaptability or versatility

If multiple separate systems are used for static and pass-by processing, then versatility is improved, but device complexity and footprint increase

Engineering Contradiction:

Improveprocessing capabilityVSAvoidsystem complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The system merges static and pass-by processing capabilities into a single integrated linear architecture. Multiple processing chambers are arranged in sequence, with carriers transitioning between static and motion phases as they move through different chamber types. This consolidation eliminates the need for separate systems while maintaining both processing modes.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The carrier system serves multiple functions: it transports substrates through pass-by chambers, holds them stationary in static chambers, and can be accelerated or decelerated as needed. The same physical carrier infrastructure supports both processing modes, making the system universal rather than requiring dedicated systems for each mode.

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Adaptability or versatility

If processing chambers are enlarged to accommodate both static and pass-by processing, then adaptability is improved, but area occupied increases

Engineering Contradiction:

Improvecombined processing capabilityVSAvoidfootprint

Core Design Contradiction:

Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The system transitions from a two-dimensional layout to a three-dimensional linear architecture. Processing chambers are arranged in a vertical stack connected by carrier transport paths, utilizing the vertical dimension to reduce the horizontal footprint. Carriers move vertically between chambers rather than requiring all chambers to be arranged horizontally.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS9914994B2System architecture for combined static and pass-by processing

Publication Date: 2018.03.13 INTEVAC INC

AI summary

Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system is constructed such that the substrates are processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.