Vertical Vacuum Orientation Module for Compact OLED Evaporation
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Solution Overview
Problem
Existing substrate processing systems for OLED displays face challenges in efficiently handling large area substrates and maintaining vacuum conditions during processing, leading to increased contamination and footprint due to the need for horizontal orientation and separate mask and carrier return paths.
Innovation Solution
A substrate processing system with a vacuum orientation module that allows for vertical substrate orientation and integrated mask handling, reducing the footprint by 'folding' deposition paths and minimizing exposure to atmospheric conditions, and utilizing a glass handling module with load lock chambers to maintain vacuum conditions during substrate loading and unloading.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If substrates are processed in horizontal orientation with separate mask and carrier return paths, then the processing system can handle large area substrates, but the system footprint increases and contamination risk increases
Solution Approach 1:
The patent merges the mask return path and carrier return path into a single integrated vacuum pathway. The mask is detached from the substrate within the vacuum chamber and returned along the same vacuum path used for substrate transport, eliminating the need for separate atmospheric return paths. This consolidation reduces the overall system footprint and minimizes contamination opportunities by keeping all critical paths under vacuum.
Solution Approach 2:
The patent transitions from horizontal substrate processing to vertical substrate orientation. Substrates are transported and processed in a vertical direction within the vacuum chamber, with the mask positioned above the substrate. This dimensional change allows for more compact system architecture and enables the mask and carrier to be returned along the same vertical vacuum path, reducing footprint and contamination risk.
2Ease of operation
If substrates are exposed to atmospheric conditions during mask detachment and return, then mask handling is simplified, but contamination of substrates increases
Solution Approach 1:
The patent maintains vacuum conditions throughout the entire mask handling process. The mask is detached from the substrate using a detachment tool that operates within the vacuum chamber, and the mask is returned to the mask holder through the same vacuum environment. This eliminates exposure to atmospheric conditions during mask detachment and return, preventing substrate contamination while keeping mask handling straightforward through automated vacuum-compatible mechanisms.
3Reliability
If multiple separate vacuum chambers are used for different processing steps, then vacuum conditions are maintained, but the system length increases
Solution Approach 1:
The patent employs a single vacuum chamber that serves multiple functions: substrate loading, mask attachment, organic layer deposition, mask detachment, and mask return. This multi-functional vacuum chamber eliminates the need for multiple separate vacuum chambers for different processing steps. The same vacuum environment is used throughout the entire process, maintaining vacuum conditions while significantly reducing system length compared to multi-chamber configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system significantly reduces the length and width of the processing system, minimizes contamination, and enhances processing efficiency by maintaining vacuum conditions throughout the substrate handling process, allowing for efficient deposition of organic and metallic layers on large area substrates.
Implementation Method 1
A process to manufacture OLED displays includes thermal evaporation of organic materials and deposition of organic materials on a substrate in a high vacuum
Implementation Method 2
glass handling module with load lock chambers to maintain vacuum conditions during substrate loading and unloading
Data Source
AI summary
A vacuum orientation module for a substrate processing system is described. The module includes at least a first vacuum orientation chamber, comprising: a vacuum chamber; a first transportation track within the vacuum chamber, the first transportation track having a first support structure and a first driving structure and defining a transportation direction; an orientation actuator to change the substrate orientation between a non-vertical orientation and a non-horizontal orientation, the vacuum chamber has a first pair of two slit openings, particularly essentially vertical slit openings, at opposing side walls of the vacuum chamber in the transportation direction; and a second transportation track within the vacuum chamber, the second transportation track having a second support structure and a second driving structure extending along the transportation direction, the vacuum chamber has a second pair of two slit openings at the opposing side walls of the vacuum chamber.