Via Filling in Printed Wiring Boards Using O2 Plasma Desmearing

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Solution Overview

Problem

Conventional methods for manufacturing printed wiring boards face challenges with desmearing and filling via drill holes, especially when using materials like PTFE with high water absorption and forming vias of large diameters or deep depths, leading to incomplete smear removal and insufficient filling due to issues with laser beam strength and plating deposition.

Innovation Solution

The method involves forming a conical frustum-shaped via drill hole with a conductive material, using a dry desmearing process like O2 plasma processing, and a two-step filling process to ensure complete smear removal and sufficient filling, even with constraints on material and size, using a copper-clad laminate and electrolytic plating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a laser beam is used to form a via drill hole in a resin layer, then the hole can be formed through the insulating layer, but residual smear (resin residue) remains in the hole preventing complete filling

Engineering Contradiction:
Improvevia filling completenessVSAvoidresin smear residue
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent applies preliminary action by performing O2 plasma treatment on the inner surface of the via drill hole before filling it with conductive material. This preliminary cleaning action removes resin smear residues that would otherwise prevent complete filling, ensuring the hole surface is properly prepared for subsequent electrolytic plating and filling operations.

Inventive Principle:
Principle #10Preliminary action

2Object-generated harmful factors

If the laser beam strength is increased to remove smear, then smear removal improves, but the insulating layer material like PTFE with high water absorption causes incomplete smear removal and filling issues

Engineering Contradiction:
Improvesmear removal efficiencyVSAvoidvia filling reliability
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent changes the parameter of smear removal method from mechanical/thermal (laser) to chemical/physical (O2 plasma). This parameter change allows effective smear removal without relying on increasing laser strength, thereby avoiding damage to PTFE insulating layer materials with high water absorption and ensuring reliable via filling.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent substitutes the mechanical/thermal laser beam system with a plasma-based chemical cleaning system. This replacement enables effective smear removal through O2 plasma oxidation without the harmful effects of high-intensity laser on water-absorbing insulating materials, improving both smear removal efficiency and filling reliability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Quantity of substance

If electrolytic plating is used to form a wiring layer in the via drill hole, then conductive material is deposited, but residual smear prevents complete filling and compromises conduction performance

Engineering Contradiction:
Improveconductive material depositionVSAvoidconduction performance
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent applies preliminary O2 plasma treatment to the via drill hole inner surface before electrolytic plating. This preliminary action removes residual smear that would interfere with conductive material deposition, ensuring complete filling and reliable conduction performance by creating a clean surface for uniform plating.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the formation of vias without residual smear and ensures complete filling, preventing water absorption issues with PTFE and enhancing the reliability of conduction performance, especially for large-diameter or deep vias.

Implementation Method 1

using a dry desmearing process like O2 plasma processing

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

O2 plasma processing

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 3

using a copper-clad laminate and electrolytic plating

Methodology Applied
Scientific EffectElectrolytic plating: Electrodeposition

Data Source

PatentUS11540390B2Printed wiring board and method of manufacturing printed wiring board
Publication Date: 2022.12.27 KYOCERA CORP
  • US11540390B2 patent drawing
  • US11540390B2 patent drawing
  • US11540390B2 patent drawing

AI summary

Forming, in a printed-wiring board, a via sufficiently filled without residual smear, for use in an insulating layer and the size of the via to be formed. A via of a printed-wiring board comprises a first filling portion which fills at least a center portion of a hole, and a second filling portion which fills a region of the hole that is not filled with the first filling portion. An interface which exists between the second and first filling portions, or an interface which exists between the second filling portion and an insulating layer and the first filling portion has the shape of a truncated cone comprising a tapered surface which is inclined to become thinner from a first surface toward a second surface, and an upper base surface which is positioned in parallel to the second surface and closer to the first surface than to the second surface.