Vibration-Controlled Substrate Handling Robots
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Solution Overview
Problem
Conventional substrate handling robots in electronic device manufacturing systems generate particles due to substrate sliding during transport, which contaminates the manufacturing environment and affects the quality of the manufactured substrates, primarily due to vibration-induced reduction in friction force during horizontal acceleration and vertical vibration from robot motions.
Innovation Solution
A vibration-controlled robot system equipped with sensors to detect vibrations and a filter to minimize undesirable vibrations, adjusting robot motion to prevent substrate sliding by optimizing motion profiles and reducing vertical vibration, thereby maintaining substrate position and reducing particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the robot moves the substrate rapidly during transport, then productivity is improved, but particle generation increases due to substrate sliding
Solution Approach 1:
The patent applies controlled mechanical vibration to the end effector during substrate transport. The vibration controller generates specific vibration patterns that reduce the coefficient of friction between the substrate and end effector surface, preventing substrate sliding even during rapid movement. This allows high-speed transport without the substrate sliding and generating particles, thus resolving the contradiction between productivity and particle generation.
Solution Approach 2:
The patent changes the physical parameters of the contact interface by introducing vibration, which dynamically modifies the friction characteristics. The vibration controller adjusts vibration amplitude and frequency parameters to optimize the friction reduction effect, enabling rapid substrate transport while maintaining substrate position stability and preventing particle generation.
2Productivity
If the robot accelerates the substrate horizontally during transport, then productivity is improved, but substrate sliding occurs due to reduced friction force
Solution Approach 1:
The vibration controller applies controlled vibration to the end effector during horizontal acceleration phases. This vibration reduces the static friction coefficient between substrate and end effector, preventing the substrate from sliding backward during acceleration while maintaining forward motion stability. The system achieves rapid acceleration without compromising substrate position stability.
Solution Approach 2:
The system applies preliminary vibration before and during acceleration phases to preemptively counteract the tendency of the substrate to slide. By activating the vibration controller in advance of acceleration events, the system prepares the contact interface with reduced friction characteristics, preventing sliding before it occurs and maintaining stable substrate positioning during high-speed transport.
3Device complexity
If the robot operates with normal vibration levels, then device complexity is minimized, but manufacturing precision deteriorates due to substrate slippage
Solution Approach 1:
The patent integrates a vibration controller connected to the end effector to apply controlled vibration during substrate handling. This addition, while increasing device complexity, dramatically improves substrate placement precision by preventing slippage during transport and acceleration. The vibration mechanism is relatively simple compared to alternative solutions, providing an effective balance between added complexity and manufacturing precision improvement.
Solution Approach 2:
The system incorporates sensors that detect substrate position and vibration characteristics, providing feedback to the vibration controller. This closed-loop control allows the system to automatically adjust vibration parameters to maintain optimal substrate positioning, achieving high manufacturing precision without requiring overly complex mechanical modifications to the robot structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The vibration-controlled robot system effectively reduces substrate slippage and particle generation by minimizing vibrations during transport, ensuring accurate placement and improving manufacturing quality.
Implementation Method 1
a sensor operable to sense vibration as the robot transports the substrate
Implementation Method 2
a filter operable to reduce vibration of the robot
Implementation Method 3
substrate sliding may be induced by horizontal substrate acceleration during normal path movements
Data Source
AI summary
Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate, and operating the robot to reduce vibration of the end effector supporting the substrate. In some embodiments, a filter is provided in the motor drive circuit to filter one or more frequencies causing unwanted vibration of the end effector. Vibration control systems and methods of operating the same are provided, as are other aspects.