Vibration Element Electrode Structure for Piezoelectric Efficiency
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Solution Overview
Problem
In existing vibration elements, the insulating film between the electrode and the piezoelectric body hinders the application of an electric field, leading to inefficient vibration characteristics.
Innovation Solution
A vibration element design featuring a first electrode with a titanium nitride layer and a second layer containing nitrogen, titanium, and oxygen, in contact with an aluminum nitride layer, allowing for efficient electric field application to the piezoelectric body without an insulating film, thereby enhancing vibration characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If an insulating film is disposed between the first electrode and the piezoelectric body, then the piezoelectric body orientation is improved, but the electric field application to the piezoelectric body is hindered
Solution Approach 1:
The patent removes the insulating film from between the first electrode and the piezoelectric body, extracting the harmful element that prevented electric field application. The first electrode is placed in direct contact with the piezoelectric body, allowing the electric field to be effectively applied while the piezoelectric body maintains proper orientation through the aluminum nitride layer's crystal structure.
Solution Approach 2:
The patent uses a composite electrode structure consisting of a first electrode layer and a second electrode layer with different material properties. The first electrode layer provides good contact with the piezoelectric body, while the second electrode layer provides appropriate electrical properties, creating a composite structure that achieves both orientation control and effective electric field application.
2Device complexity
If an insulating film is disposed between the electrode and the piezoelectric body, then the structure is simplified, but the vibration characteristics become inefficient
Solution Approach 1:
The patent removes the insulating film that was present in conventional structures, simplifying the overall device structure by eliminating an unnecessary layer. This extraction of the harmful insulating element directly improves vibration efficiency by enabling effective electric field application to the piezoelectric body.
Solution Approach 2:
The patent employs a composite electrode structure with multiple layers having different material characteristics. This composite approach achieves both structural simplicity and high vibration efficiency by optimizing the electrical and mechanical properties of each layer without requiring additional insulating films.
3Ease of manufacture
If the first electrode is made of titanium nitride only, then the manufacturing process is simplified, but the C-axis orientation of the aluminum nitride layer is insufficient
Solution Approach 1:
The patent creates a composite first electrode consisting of a first electrode layer and a second electrode layer with different material compositions. The first electrode layer is made of titanium nitride, while the second electrode layer contains nitrogen, titanium, and oxygen in specific proportions. This composite structure promotes proper C-axis orientation of the aluminum nitride layer while maintaining ease of manufacture through established sputtering processes.
Solution Approach 2:
The patent modifies the compositional parameters of the electrode layers by introducing oxygen into the second electrode layer. This parameter change in the electrode material composition fundamentally alters the crystal growth conditions, enabling the aluminum nitride layer to achieve proper C-axis orientation that is critical for piezoelectric performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables better C-axis orientation of the aluminum nitride layer, allowing for efficient bending vibrations and improved performance by ensuring a strong electric field is applied to the piezoelectric body, even without an insulating film, thus enhancing the vibration element's efficiency.
Implementation Method 1
This configuration enables better C-axis orientation of the aluminum nitride layer, allowing for efficient bending vibrations and improved performance
Implementation Method 2
an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer
Data Source
AI summary
A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.