Vibration Substrate Beam Structure for Stress Isolation
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Solution Overview
Problem
Existing vibration substrates face challenges in maintaining stable vibration characteristics due to stress propagation from the outer substrate to the main body region, leading to fluctuations in performance, especially when reduced in size.
Innovation Solution
The vibration substrate design incorporates a main body region with a vibrating portion and a holding region connected by a beam portion with arm extensions and recesses, which attenuates stress propagation and reduces strain, improving mechanical strength and vibration stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the vibration substrate is reduced in size, then the device size is reduced, but mechanical strength decreases and strain occurs in the main body region
Solution Approach 1:
The holding region is divided into multiple holding portions (first holding portion and second holding portion) that are spatially separated and connected through beam portions. This segmentation distributes the mechanical load across multiple attachment points, preventing concentration of stress in a single location and thereby maintaining mechanical strength even as the overall substrate size is reduced.
Solution Approach 2:
The beam portions connecting the holding portions are designed with specific geometric characteristics (extending in multiple directions with connection portions) that provide localized structural reinforcement. These beam portions have different structural properties than the main body region, creating local quality variations that enhance mechanical strength at critical stress points while keeping the overall device compact.
2Volume of moving object
If the holding region approaches the main body region, then device size is reduced, but stress propagates from the outer substrate to the main body region
Solution Approach 1:
The beam portions serve as intermediary elements between the holding region and the main body region. These beam portions with their specific geometric configuration (extending in multiple directions with connection portions) act as stress-isolating intermediaries that decouple the stress fields, preventing direct stress propagation from the holding region through the beam portions to the main body region where vibration occurs.
3Volume of moving object
If the vibration substrate is thinned, then device size is reduced, but mechanical strength decreases and strain occurs
Solution Approach 1:
By segmenting the holding region into multiple holding portions connected by beam portions, the invention creates a distributed support structure that maintains reliability even with substrate thinning. The segmented structure provides multiple load paths and prevents localized failure from propagating, thereby maintaining vibration characteristic stability despite reduced substrate thickness.
Solution Approach 2:
The beam portions with their specific geometric characteristics provide localized structural reinforcement at critical areas. This local quality enhancement compensates for the overall substrate thinning, maintaining mechanical strength and vibration characteristic stability in the thinned regions while keeping the device compact.
Data Source
AI summary
The vibration substrate having a main surface extending parallel to a first direction and a second direction that are orthogonal to each other, and that includes a main body region having a vibrating portion at least in a part thereof and at least one holding region arranged side by side with the main body region along the first direction. The at least one holding region including a holding portion and a beam portion connecting the holding portion and the main body region. The beam portion includes a first arm portion extending from the holding portion along the first direction, a second arm portion extending along the second direction from an end portion of the first arm portion on a side thereof opposite to the holding portion, and a connection portion connecting the second arm portion and the main body region.