Vibrator Device, Electronic Apparatus, And Vehicle
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Solution Overview
Problem
The existing vibrator device experiences capacitive coupling between the inner lead for the detection signal electrode and the drive signal electrode, leading to noise interference that degrades the detection accuracy of angular velocity.
Innovation Solution
The vibrator device incorporates a support substrate with specific interconnection arrangements, including a shield layer, to isolate the drive and detection signal paths, preventing noise interference and enhancing detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the inner lead for the detection signal electrode is disposed close to the drive signal electrode, then the device complexity is reduced, but capacitive coupling occurs between the leads causing noise interference that degrades detection accuracy
Solution Approach 1:
A shield member is introduced as an intermediary component between the drive signal electrode and the detection signal electrode. This shield member, connected to ground potential, acts as an electrostatic shield that blocks the capacitive coupling between the two signal paths, thereby preventing noise interference while allowing the leads to be disposed close together for simplified device structure
Solution Approach 2:
The harmful capacitive coupling effect is extracted and isolated by introducing the shield member that captures and redirects the electric field interference to ground potential, separating the drive and detection signal paths electrically while maintaining their physical proximity for compact design
2Device complexity
If no shield member is provided between the drive signal electrode and detection signal electrode, then the device complexity is reduced, but noise interference degrades the detection accuracy
Solution Approach 1:
The shield member serves as a ground-connected intermediary that intercepts and redirects the electric field from the drive signal electrode, preventing it from coupling into the detection signal electrode and thereby eliminating noise interference without requiring complex shielding structures
Solution Approach 2:
The shield member converts the potentially harmful capacitive coupling effect into a beneficial grounding path, where the electric field interference is deliberately directed to ground potential rather than allowing it to contaminate the detection signal, thus transforming noise into a controlled reference potential
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses noise interference, allowing for highly accurate detection of angular velocity with improved signal-to-noise ratio.
Implementation Method 1
capacitive coupling easily occurs between the inner lead for the detection signal electrode and the drive signal electrode
Data Source
AI summary
A vibrator device includes a vibrator element, and a support substrate disposed so as to be opposed to the vibrator element. The support substrate includes a base configured to support the vibrator element, a support configured to support the base, a plurality of beams configured to couple the base and the support to each other, and a drive signal interconnection, a drive constant-potential interconnection, a detection signal interconnection, and a detection constant-potential interconnection each laid around the base and the support passing the beams, and in predetermined one of the beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on a surface on the vibrator element side, and the detection signal interconnection is disposed on a surface on the opposite side.


