Alternating transducer pre-charging and common-mode control raise MEMS interface signal gain beyond supply limits while tolerating leakage.
A shielded support-substrate interconnect layout blocks capacitive coupling between drive and detection leads, improving angular velocity detection accuracy.
Multiple detection levels and a mask signal suppress false failure flags from impact- or vibration-induced resonance in physical quantity sensing.
Mask signals compare amplifier outputs to suppress resonance-induced false failure flags during impact or vibration in physical quantity detection circuits.
PLL and acceleration monitoring detect shock early and switch clock generation to a local oscillator to avoid freezes and data discontinuity.
A self-biasing reference circuit makes strain sensing less sensitive to supply voltage and temperature while improving precision and power use.
Adjustable optical trap stiffness lets a levitated nanoparticle accelerometer balance high sensitivity with wider acceleration range.
A digital equalization filter flattens MEMS accelerometer response beyond resonance, extending bandwidth while limiting noise growth.
Random delay selection shifts phase during sampling to suppress idle tone noise and improve frequency delta-sigma signal accuracy.
A mechanical decoupling structure acts as a low-pass filter in resonant MEMS sensors to block spurious modes and extend acceleration range.
A matched filter compensates for co-sensor spectral response to cut high-frequency noise and improve atomic sensor precision in noisy settings.
Rotating a quartz oscillator around orthogonal axes separates periodic g-effects from temperature drift for practical, accurate sensitivity measurement.
A matched filter aligns atomic and co-sensor transfer functions to cancel high-frequency noise and maintain precise measurements during sensor downtime.
Free-oscillation cycle counting lets an ASIC detect piezoelectric resonance and tune a notch filter without slow sweeps or complex circuits.
Transverse electrostatic excitation triggers resonant vibration to break stiction bonds in MEMS movable masses without causing opposite-side adhesion.
Balanced resistive DAC feedback and switch-controlled differential inputs reduce flicker-noise-driven bias instability in motion sensor sigma-delta ADCs.
Pressure-damping combs stabilize the proof mass while resonator geometry avoids air damping to preserve high Q and lower accelerometer noise.
Synchronous dual filtering linearizes resonant sensor signals while reducing noise and vibration rectification errors without added correction circuits.
A digital equalization filter flattens MEMS accelerometer response beyond resonance, extending bandwidth while limiting noise growth.
Sensor-based exercise detection lets a mobile terminal adjust volume and sound frequency automatically for more comfortable audio during workouts.
Segmented isolation blocks cut axial strain and end-pumping in vibrating beam accelerometers, improving acceleration measurement precision.
Photonic integrated circuits replace bulk optics to align cooling and probe beams in vapor chambers for compact, scalable atomic sensors.
A ground interconnection shields detection lines from drive-signal coupling, improving angular velocity detection accuracy and SNR.
Selective short and long IIR filters clean gyroscope and accelerometer data to detect barrier open/close status on moving platforms.
Adaptive idle-state filtering calibrates yaw rate sensor offset from the sensor's own data, improving precision under noise and slight motion.
Multi-stage filtering and feedback suppress frequency spikes in HTPE transducers, extending bandwidth and stability at high temperatures.
Distributed street light sensors and mesh communication detect seismic waves, locate epicentres, and send local warning signals.
A transparent cap enables optical excitation and readout of a hermetically sealed resonator, preserving vacuum integrity in harsh environments.
Dual EKFs fuse two star trackers and a 3-axis gyro to improve satellite attitude estimation accuracy with lightweight MEMS-class sensors.
Integrated grating emitters in parallel PICs replace bulk optics to align cooling and probe beams precisely in a compact atomic sensor.
Synchronous delta-sigma modulation and dual low-pass filtering correct sensor nonlinearity while reducing noise and circuit complexity.
Common paper replaces functionalized substrates and vacuum processing to enable low-cost flexible sensing of temperature, pressure, humidity, and pH.
Filtered accelerometer and gyroscope data detect door open or close status reliably on moving platforms despite orientation shifts and sensor noise.
A mirrored on-chip reference microstructure tracks substrate thermal strain so capacitive drift can be subtracted from MEMS sensing signals.
Multi-axis rotation and least-squares fitting estimate quartz oscillator g-sensitivity while compensating for temperature drift in board-level tests.
One-sided cantilever suspension improves charge uniformity and lowers spring constant in piezoelectric rotational MEMS resonators.
Digital variable capacitors replace continuous analog adjustment to preserve CV gain, output swing, and low-power sensing under temperature drift.
A suspended silicon nanowire strain gauge boosts NEMS resonator detection sensitivity while limiting stress, drift, and quality-factor loss.
Gyroscope-based orientation tracking and IIR filtering improve barrier open/close detection on moving platforms while reducing false events.
Multiple differential sensor elements in a common anchor enable double differential sensing and self-test while minimizing stress-induced errors.
Accelerometer-based correction factors help oscillators counter multi-axis vibration, reducing phase and amplitude errors in RF signals.
Uses exercise-state sensing to adjust mobile audio volume automatically, reducing manual changes and matching playback to activity intensity.
Distributed street light sensors use mesh communication and geocoordinates to detect earthquakes, locate epicenters, and issue local warnings.
Cross-correlating microphone and accelerometer signals suppresses ambient noise without muting speech in mobile communication devices.
Applying fixed and swept excitation frequencies induces combination resonances in MEMS and NEMS, expanding bandwidth and usable operating ranges.
Stored polynomial coefficients enable higher-accuracy temperature correction in an inertial force sensor without larger circuits or heavier computation.
Two piezoelectric ceramic elements with opposite polarity offset thermal sensitivity shift while preserving force measurement sensitivity.
Accelerometer signals and a lookup table correct vibration-induced oscillator phase and amplitude errors, preserving RF spectral purity and stability.
Cavity electrodes inside the support wafer tune MEMS oscillation frequency precisely while resisting packaging distortion and preserving out-of-plane Q.