Vibrator Substrate Layout With Shielded Detection Interconnections
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing vibrator devices suffer from capacitive coupling between the drive signal electrode and the detection signal electrode, leading to noise interference and degraded detection accuracy due to the lack of a shielding mechanism.
Innovation Solution
The vibrator device incorporates a support substrate with strategically positioned interconnections and electrodes, including a detection ground interconnection acting as a shield layer, to prevent noise interference between the drive signal electrode and the detection signal interconnections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the inner lead for the detection signal electrode is disposed close to the drive signal electrode to reduce layout complexity, then device complexity is reduced, but capacitive coupling occurs causing noise interference and degraded detection accuracy
Solution Approach 1:
A shield member is introduced as an intermediary component between the drive signal electrode and the detection signal electrode. This shield member, connected to ground potential, acts as an electromagnetic shield that blocks capacitive coupling and noise interference while allowing the close proximity layout to be maintained. The shield member effectively mediates the interaction between the two electrodes, preventing harmful electromagnetic coupling.
2Device complexity
If no shield member is provided between the drive signal electrode and detection signal electrode to simplify structure, then device complexity is reduced, but noise interference degrades detection accuracy
Solution Approach 1:
The shield member serves as a ground-connected intermediary that blocks electromagnetic interference between the drive and detection signal paths. By placing this ground-referenced shield between the electrodes, the structure remains relatively simple while effectively preventing noise coupling that would otherwise require more complex filtering or isolation circuits.
3Force
If the drive signal is applied with high amplitude to improve drive vibration strength, then drive vibration is enhanced, but noise mixing into the detection signal increases
Solution Approach 1:
The shield member provides electromagnetic isolation between the high-amplitude drive signal path and the sensitive detection signal path. This ground-referenced shield acts as a barrier that prevents the strong drive signal from capacitively coupling into the detection circuit, allowing high drive amplitudes to be used without compromising detection accuracy.
Solution Approach 2:
The shield member, by being connected to ground, converts the potentially harmful electromagnetic field from the drive signal into a controlled reference potential. The shield intercepts the electromagnetic energy that would otherwise couple into the detection circuit, and by grounding it, this energy is safely dissipated, turning a harmful interference source into a controlled reference.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses noise interference, enabling the transmission of highly accurate detection signals with a high signal-to-noise ratio, thereby improving the detection accuracy of angular velocity.
Implementation Method 1
a detection arm which is provided with a detection signal electrode and a detection constant-potential electrode, and performs a detection vibration in accordance with inertia to thereby output a detection signal from the detection signal electrode
Implementation Method 2
capacitive coupling easily occurs between the inner lead for the detection signal electrode and the drive signal electrode, and there is a problem that the drive signal to be applied to the drive signal electrode is mixed as a noise into the detection signal via the inner lead for the detection signal electrode
Data Source
AI summary
A vibrator device includes a vibrator element, and a support substrate disposed so as to be opposed to the vibrator element. The support substrate includes a base configured to support the vibrator element, a support configured to support the base, a plurality of beams configured to couple the base and the support to each other, and a drive signal interconnection, a drive constant-potential interconnection, a detection signal interconnection, and a detection constant-potential interconnection each laid around the base and the support passing the beams, and in predetermined one of the beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on a surface on the vibrator element side, and the detection signal interconnection is disposed on a surface on the opposite side.