Vibrator Device Laser Shielding Support Substrate

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Solution Overview

Problem

Existing vibrator devices face challenges in protecting the circuit element from laser irradiation during frequency adjustment, leading to potential damage and requiring complex, costly configurations to prevent damage.

Innovation Solution

A vibrator device design that includes a support substrate with light shielding properties positioned between the circuit element and the vibrating element, which absorbs stress and prevents laser irradiation by using a metal film with thicker shielding portions to block the laser beam before it reaches the circuit element.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the circuit element is positioned immediately below the angular velocity sensor element for compact design, then the device size is reduced, but the circuit element is damaged by laser irradiation during frequency adjustment

Engineering Contradiction:

Improvedevice sizeVSAvoidlaser damage to circuit element

Core Design Contradiction:

Volume of moving objectVSObject-affected harmful factors

Solution Approach 1:

A shielding portion is introduced as an intermediary element between the vibrating element and the circuit element. This shielding portion blocks the laser beam that passes through the vibrating element during frequency adjustment, preventing the laser from reaching and damaging the circuit element mounted on the base.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The solution adds a new dimensional element (the shielding portion extending in the thickness direction) to the existing structure. By extending the support substrate or adding a separate shielding layer in the thickness direction, the laser path is blocked without increasing the planar footprint of the device.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Object-affected harmful factors

If a protective film is added to protect the circuit element from laser damage, then the circuit element is protected, but the apparatus configuration becomes complicated and costly

Engineering Contradiction:

Improvelaser protection of circuit elementVSAvoidapparatus configuration

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The shielding function is merged with the existing support substrate structure. The support substrate is extended in the thickness direction to form an integrated shielding portion, combining the support function and laser shielding function into a single structural element, thereby avoiding additional separate protective components.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The support substrate serves multiple functions: it supports the vibrating element, provides mechanical stability, and its extended portion acts as a laser shield. This multi-functionality eliminates the need for separate protective films or structures, simplifying the overall apparatus configuration.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Object-affected harmful factors

If the support substrate includes a shielding portion to block laser beams, then the circuit element is protected from damage, but the manufacturing complexity increases

Engineering Contradiction:

Improvelaser shieldingVSAvoidmanufacturing complexity

Core Design Contradiction:

Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The support substrate is segmented into functional regions: a base portion for mounting on the base, a support portion for holding the vibrating element, and a shielding portion extending toward the circuit element. This segmentation allows each region to be optimized for its specific function while maintaining manufacturability through standard fabrication processes.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The support substrate is formed from a material that provides both mechanical support and laser shielding properties. By using a composite structure or material with appropriate optical and mechanical properties, the shielding portion effectively blocks laser beams while maintaining structural integrity and compatibility with existing manufacturing processes.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively suppresses damage to the circuit element by blocking the laser beam and stabilizing the vibrating element's vibration characteristics, reducing the complexity and cost of the apparatus configuration.

Implementation Method 1

a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties

Methodology Applied

Scientific EffectLight shielding: Absorption (EM radiation)

Data Source

PatentUS11444235B2Vibrator device, electronic apparatus, and vehicle

Publication Date: 2022.09.13 SEIKO EPSON CORP

AI summary

The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.