Vibrator Shielding Portion for Splash-Resistant Sealing
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Solution Overview
Problem
Existing physical quantity detection devices face challenges in minimizing the scattering of sealing material during the sealing process, which can attach to the vibration element and degrade its performance.
Innovation Solution
A vibrator design that incorporates a diffusion object shielding portion to accommodate and detain splash-diffused metal components from the sealing material, preventing them from attaching to the functional element, and a manufacturing method that forms this shielding portion as part of the functional element or substrate, ensuring high accuracy without additional manufacturing steps or increased costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the sealing material is irradiated with electron beams such as laser light so as to be melted and to close the through hole, then the through hole is sealed and the package is air-tightly held, but part of the melted sealing material may scatter or diffuse in the package as splash and attach to the vibrating component, increasing its weight and degrading vibration characteristics
Solution Approach 1:
A shielding member is introduced as an intermediary component between the sealing hole and the vibration element. This shielding member intercepts the splash-diffused metal components from the sealing material, preventing them from reaching and attaching to the vibration element, thereby resolving the contradiction between achieving reliable sealing and maintaining manufacturing precision
Solution Approach 2:
The harmful splash-diffused metal components are extracted from the problematic path by the shielding member. The shielding member captures these scattered particles in a designated area, removing them from the trajectory that would lead to the vibration element, thus protecting the vibration characteristics while maintaining sealing integrity
2Manufacturing precision
If a ring-shaped member is disposed inside the seal ring to prevent metal component scattering, then the vibration element is protected from contamination, but the device structure becomes more complex with additional components
Solution Approach 1:
The shielding member is merged with the base structure, forming an integrated component rather than a separate movable part. The shielding portion is formed as a fixed structure on the base that corresponds to the vibration element's position, combining the protective function with the existing base structure and reducing overall device complexity
Solution Approach 2:
The shielding member is pre-positioned and fixed to the base before the sealing process. This preliminary arrangement ensures that when the sealing material is melted and splashes, the shielding structure is already in place to intercept the scattered particles, preventing contamination without requiring additional components during operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively minimizes the attachment of splash-diffused metal components to the functional element, maintaining high accuracy and performance of the vibrator, and reduces manufacturing costs by integrating the shielding portion with the functional element.
Implementation Method 1
when the sealing material is irradiated with electron beams such as laser light so as to be melted
Implementation Method 2
detects a physical quantity such as acceleration or angular velocity on the basis of capacitance between the fixed electrode and the movable electrode
Data Source
AI summary
A vibrator includes a base, a lid, and a functional element that is stored in a cavity formed by the base and the lid, in which the lid is provided with a sealing hole that penetrates through the lid and a sealing member that air-tightly seals the sealing hole, and in which the functional element includes a diffusion object shielding portion having a region of an accommodation opening which overlaps at least part of a region of a first opening of the sealing hole on a surface of the lid on the cavity side in a plan view of the functional element and the lid.


