Vibrator Support Substrate Layout for Low-Noise Signal Detection
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Solution Overview
Problem
Existing vibrator devices face challenges in maintaining detection accuracy due to noise interference between drive signal and detection signal interconnections, which are often closely disposed on the same beam part, leading to deteriorated detection performance.
Innovation Solution
The vibrator device incorporates a support substrate with a gimbal structure and interconnections that separate drive signal and detection signal interconnections through distinct inner and outer beams, ensuring they are laid around the element mounting base and supporting base through different beams, thereby maintaining a sufficient distance and preventing noise interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If drive signal interconnection and detection signal interconnection are disposed close to each other on one beam part, then device complexity is reduced, but noise interference occurs and detection accuracy deteriorates
Solution Approach 1:
The support substrate is divided into multiple beam parts (first beam part, second beam part, third beam part) that are spatially separated. Drive signal interconnections are routed through the first and second beam parts, while detection signal interconnections are routed through the third beam part. This segmentation physically separates the signal paths, preventing noise interference while maintaining a compact overall structure.
Solution Approach 2:
The interconnections are arranged in different spatial dimensions and directions on the support substrate. By utilizing multiple beam parts extending in different directions from the element mounting base, the patent creates distinct spatial pathways for drive and detection signals, effectively separating them in the spatial domain to avoid electromagnetic interference.
2Measurement precision
If drive signal interconnection and detection signal interconnection are separated through different beam parts, then noise interference is prevented and detection accuracy is improved, but device complexity increases
Solution Approach 1:
The support substrate serves multiple functions: it mechanically supports the element mounting base, provides electrical interconnections for both drive and detection signals, and acts as a noise isolation structure. By integrating these functions into a single component with a carefully designed beam structure, the patent achieves signal separation without proportionally increasing overall device complexity.
Solution Approach 2:
The interconnection structure is nested within the support substrate framework. Multiple beam parts are arranged in a hierarchical pattern where the third beam part (carrying detection signals) is positioned to extend from the element mounting base in a direction different from the first and second beam parts (carrying drive signals), creating a compact nested arrangement that minimizes space usage while maintaining signal separation.
Data Source
AI summary
A vibrator device has the vibrator element, a support substrate supporting the vibrator element, and a plurality of interconnections disposed on the support substrate. The support substrate includes an element mounting base, a supporting base, a frame located between the element mounting base and the supporting base, inner beams for coupling the element mounting base and the frame to each other, and outer beams for coupling the frame and the supporting base to each other. The plurality of interconnections include a drive signal interconnection and a detection signal interconnection laid around to the element mounting base and the supporting base, and the drive signal interconnection and the detection signal interconnection are laid around to the element mounting base and the frame through the respective inner beams different from each other, and are laid around to the frame and the supporting base through the respective outer beams different from each other.