Tuning-Fork Vibrator Weight Scars for Centroid Alignment

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Solution Overview

Problem

Tuning-fork vibrator elements experience unwanted vibrations due to centroid shift caused by asymmetric groove formation during wet etching, leading to impaired vibration balance and detection accuracy.

Innovation Solution

The vibrator element features weights with processing scars formed by laser irradiation, where the scars are larger on one side of the centroid axis than the other, adjusting the mass distribution to align the centroid with the central axis, thereby reducing unwanted vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wet etching is used to form grooves on the vibrating arm, then the piezoelectric effect is enhanced, but the groove shape becomes asymmetric due to etching anisotropy, causing centroid shift and unwanted vibrations

Engineering Contradiction:
Improvepiezoelectric effectVSAvoidgroove shape symmetry
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent intentionally introduces asymmetric processing scars on the weight surface to counterbalance the asymmetric groove shapes caused by wet etching anisotropy. This deliberate asymmetry in the weight distribution compensates for the centroid shift, allowing the overall structure to maintain proper vibration characteristics despite the asymmetric grooves.

Inventive Principle:
Principle #4Asymmetry

2Object-generated harmful factors

If the groove shape is made symmetric, then unwanted vibrations are reduced, but the piezoelectric effect is diminished

Engineering Contradiction:
Improveunwanted vibrationVSAvoidpiezoelectric effect
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent applies different characteristics to different parts of the vibrating arm: asymmetric grooves are formed to enhance the piezoelectric effect in the arm structure, while asymmetric processing scars are selectively applied to the weight surface to counterbalance the centroid shift. This local differentiation allows each part to fulfill its specific function without compromising the overall performance.

Inventive Principle:
Principle #3Local quality

3Shape

If a weight is irradiated symmetrically with laser beam, then the weight distribution appears balanced, but the centroid shift from asymmetric grooves increases unwanted vibrations

Engineering Contradiction:
Improveweight symmetryVSAvoidunwanted vibration
Core Design Contradiction:
ShapeVSObject-generated harmful factors

Solution Approach 1:

The patent applies preliminary anti-action by introducing processing scars that create a counterbalancing asymmetric mass distribution on the weight. This pre-established counterbalance compensates for the centroid shift caused by the asymmetric grooves before the device operates, thereby preventing unwanted vibrations from occurring in the first place.

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively minimizes unwanted vibrations, enhancing the vibration balance and detection accuracy of the tuner-fork vibrator element.

Implementation Method 1

forming at least one processing scar on the weight by irradiating the weight with a laser beam to thin or remove the weight in a thickness direction of the vibrating arm

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

there is described a method of providing a tip part of a vibrating arm with a metal film, and then irradiating the metal film with a laser beam to thereby remove a part of the metal film as a method of adjusting the frequency of a tuning-fork vibrator element. The tuning-fork vibrator element described in Document 1 is provided with grooves disposed on an upper surface and a lower surface of the vibrating arm, and electrodes formed in the grooves in order to further enhance the piezoelectric effect

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS12136909B2Vibrator element including base part, vibrating arm and weight provided to vibrating arm, vibrator device including vibrator element, and method of manufacturing vibrator element
Publication Date: 2024.11.05 SEIKO EPSON CORP
  • US12136909B2 patent drawing
  • US12136909B2 patent drawing
  • US12136909B2 patent drawing

AI summary

A vibrator element includes at least one vibrating arm with a weight provided thereto. The weight is provided with at least one processing scar. When an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is a centroid axis, the processing scar is formed in at least an area at the centroid axis side with respect to the central axis. S1>S2, where an area of the processing scar located at the centroid axis side with respect to the central axis is S1, and an area of the processing scar located at an opposite side to the centroid axis with respect to the central axis is S2.