Vortex Dichroism Dark-Field Confocal Microscopy for 3D IC Defect Chirality
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Solution Overview
Problem
Conventional optical dark-field confocal microscopy measurement technology has limitations in detecting micro-scale defects and cannot capture detailed defect characteristics in 3D integrated circuits, leading to insufficient accuracy in defect determination.
Innovation Solution
A vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation, which generates a mixed vortex beam with positive and negative orbital angular momentum, spatially separates the sample reflection beam, and detects the vortex dichroism signal to indicate defect presence and chirality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional optical dark-field confocal microscopy measurement technology is used, then non-destructive detection is achieved, but defect determination accuracy is insufficient
Solution Approach 1:
The patent introduces orbital angular momentum as an additional dimension of light characterization beyond conventional intensity and phase. By encoding defect information in the orbital angular momentum state of reflected light, the system achieves enhanced defect detection accuracy while maintaining non-destructive testing capability. The spiral transformation module converts orbital angular momentum states into spatially separated beams, enabling precise measurement of defect characteristics.
Solution Approach 2:
The patent changes the fundamental parameter of light from conventional scalar amplitude to vectorial orbital angular momentum state. By manipulating the topological charge and radial mode structure of vortex beams, the system creates sensitive probes that can detect subtle defect characteristics. The liquid crystal spatial light modulators dynamically adjust orbital angular momentum parameters to optimize defect detection for different defect types and scales.
2Measurement precision
If conventional dark-field confocal microscopy is used, then imaging resolution is high, but response rate to micro-scale defects is low
Solution Approach 1:
The patent employs periodic scanning of the sample stage combined with periodic modulation of the vortex beam parameters. The spiral transformation module rapidly switches between different orbital angular momentum states, creating a periodic interrogation pattern that enhances the response rate. This periodic action allows the system to efficiently scan through multiple defect characteristics and identify micro-scale defects at high speed while maintaining high imaging resolution.
3Device complexity
If conventional optical measurement technology is used, then simple structure is maintained, but information acquisition dimensions are limited
Solution Approach 1:
The patent segments the complex measurement task into distinct functional modules: vortex beam generation, spiral transformation, spatial separation, and detection. Each module handles a specific aspect of information acquisition, allowing the system to capture multiple defect characteristics simultaneously. The segmentation enables independent optimization of each module while collectively achieving high-dimensional information acquisition without excessive overall complexity.
Solution Approach 2:
The spiral transformation module acts as an intermediary that converts the abstract orbital angular momentum states into concrete spatial beam patterns. This intermediary transformation enables the detection system to access high-dimensional defect information through spatially separated beams, effectively bridging the gap between complex light states and measurable signals while expanding information acquisition dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection and characterization of interlayer defects in 3D integrated circuits by determining the chirality of defects, expanding the detectable defect characteristics and improving defect determination accuracy.
Implementation Method 1
the first liquid crystal spatial light modulator is configured to perform phase modulation on a reflection beam of the first non-polarizing beam splitter, to obtain the mixed vortex beam
Implementation Method 2
the objective lens is configured to focus transmission beam of the second non-polarizing beam splitter to the scanning position of the to-be-measured sample, to obtain the sample reflection beam of the scanning position
Implementation Method 3
a spiral transformation module configured to spatially separate the sample reflection beam to obtain spatially separated beams, where the spatially separated beams include a first beam corresponding to the positive m-order orbital angular momentum and a second beam corresponding to the negative m-order orbital angular momentum
Implementation Method 4
a multi-order detection module configured to detect the spatially separated beams to obtain a vortex dichroism signal at the scanning position, where the vortex dichroism signal is used to indicate whether there is a defect at the scanning position and a defect chirality if a defect exists
Data Source
AI summary
This application provides a vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation. An opposite-order vortex beam generation module is configured to generate a mixed vortex beam, a sample scanning module is configured to irradiate a scanning position of a to-be-measured sample by using the mixed vortex beam, to obtain a sample reflection beam. A spiral transformation module is configured to spatially separate the sample reflection beam to obtain spatially separated beams. A multi-order detection module is configured to detect the spatially separated beams to obtain a vortex dichroism signal at the scanning position. When the scanning position of the to-be-measured sample is defect-free, the vortex dichroism signal is zero. Conversely, when defects are present at the scanning position, the vortex dichroism signal is non-zero. The positive and negative the vortex dichroism signal respectively correspond to the left-handed and right-handed chirality of the defects.