Vortex Interference Confocal Microscopy for Phase Defect Detection
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Solution Overview
Problem
Conventional optical dark-field confocal microscopy measurement technology has a low response rate to micro-scale defects and struggles to detect phase-type defects in 3D integrated circuits, making it challenging to obtain accurate phase information and defect detection.
Innovation Solution
A dark-field confocal microscopy measurement apparatus based on vortex interference is developed, which includes a vortex light generation module, a vortex light interference module, and a rotation demodulation module. This apparatus generates vortex light with a predetermined order, divides it into reference and imaging light, and performs interference to obtain petal-shaped light spots, allowing for rotation demodulation to extract amplitude and phase information of defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional optical dark-field confocal microscopy measurement technology is used, then the imaging resolution and optical sectioning capability are improved, but the response rate to micro-scale defects and detection capability of phase-type defects deteriorates
Solution Approach 1:
The patent changes the optical parameter from conventional light to vortex light with topological charge, fundamentally altering the light field structure. This parameter change enables the system to detect both amplitude and phase information of defects, resolving the contradiction between imaging resolution and defect detection capability for phase-type defects
Solution Approach 2:
The patent introduces vortex light as an intermediary between the light source and the sample. The vortex light with its unique phase structure acts as a mediator that enhances the interaction with phase-type defects, enabling detection that conventional light cannot achieve while maintaining high imaging resolution
2Measurement precision
If conventional dark-field confocal microscopy is used, then the optical sectioning capability is improved, but the ability to obtain phase information deteriorates
Solution Approach 1:
The patent changes the light field parameter from conventional Gaussian beam to vortex beam with helical phase front. This parameter transformation enables the system to capture phase information through the interference pattern of vortex light, eliminating the information loss while preserving optical sectioning capability
3Device complexity
If conventional light is used for illumination, then the system simplicity is maintained, but the detection accuracy of phase-type defects deteriorates
Solution Approach 1:
The patent modifies the fundamental parameter of illumination light from conventional light to vortex light. This single parameter change enables phase-type defect detection without requiring complex additional optical components, maintaining system simplicity while dramatically improving detection accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively characterizes amplitude and phase information of defects, enabling the detection of phase-type defects such as bubbles and layer faults in 3D integrated circuits, thereby improving the accuracy and sensitivity of defect detection.
Implementation Method 1
enable the reference light and the sample reflection light to overlap and interfere with each other to obtain interference light
Data Source
AI summary
This application relates to optical precision measurement and provides a dark-field confocal microscopy measurement apparatus based on vortex interference. A vortex light generation module is configured to generate vortex light with a predetermined order. A vortex light interference module is configured to: divide the vortex light into reference light and imaging light, direct the imaging light to irradiate a scanning position of a to-be-measured sample, to obtain sample reflection light of the scanning position, and enable the reference light and the sample reflection light to overlap and interfere with each other to obtain interference light. A rotation demodulation module is configured to perform rotation demodulation on the interference light, to obtain amplitude and phase information of the scanning position, so as to characterize the amplitude and phase information of defects and realize detection of phase-type defects.