Wafer Lot Box Robot With Turntable for Legacy Tool Automation
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Solution Overview
Problem
Legacy process tools for handling semiconductor wafers in semiconductor processing are not compatible with modern automated systems, and there is a need to automate the handling of these tools and manual systems, which are not compatible with modern automated material handling systems (AMHS) for semiconductor processing, and there is a desire to automate the handling of semiconductor wafers.
Innovation Solution
A robot with a robotic arm and a turntable that rotates relative to the arm, capable of handling wafer cassettes, which includes a passive end-effector for manipulating lot boxes, allowing automated unloading and loading processes, and a turntable that provides an additional axis of freedom to reduce the robotic arm's movement and increase throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual handling of wafer cassettes is used in legacy process tools, then human intervention is required which increases labor costs and particle generation, but automation is not compatible with legacy tools
Solution Approach 1:
A robot system acts as an intermediary between legacy process tools and modern automated material handling systems. The robot includes a robotic arm with an end-effector configured to manipulate lot boxes and wafer cassettes, enabling automated handling while interfacing with legacy tools that were not originally designed for automation. This mediator approach allows automation benefits to be applied to legacy equipment without requiring modification of the legacy tools themselves.
2Adaptability or versatility
If a robotic arm with multiple degrees of freedom is used, then the robotic arm can reach all positions but the system complexity increases
Solution Approach 1:
The robotic system segments the degrees of freedom between two components: a robotic arm with 6 axes of freedom and a turntable providing a 7th axis. This segmentation allows each component to have a simpler, more specialized function while achieving complex overall motion capability. The turntable handles rotational positioning, allowing the robotic arm to focus on precise manipulation movements.
3Ease of operation
If actuated grippers are used for manipulating lot boxes, then gripping force can be controlled but the system becomes more complex and costly
Solution Approach 1:
The end-effector is designed as a passive, self-service mechanism that manipulates lot boxes and wafer cassettes without requiring active actuation or controlled gripping forces. The design leverages the geometry and friction characteristics of the lot box handles and cassette edges, allowing the robotic arm to manipulate these objects through simple mechanical contact rather than active gripping. This eliminates the need for complex actuated gripper mechanisms while maintaining effective manipulation capability.
Data Source
Figure 1A
Figure 1B
Figure 1C~1D
AI summary
Apparatus and methods for process tool tending in a semiconductor fab are disclosed. In certain embodiments, a robot includes a robotic arm and a turntable that rotates relative to the robotic arm. The turntable holds at least one lot box storing a wafer cassette of semiconductor wafers, and the robotic arm includes an end-effector operable to manipulate the lot box. Accordingly, the robot handles wafer lot boxes to improve semiconductor fab throughput by automating unloading and loading processes that are conventionally performed manually. For example, the robot can transport a wafer lot box to a point of use, remove the wafer cassette from the lot box, load the wafer cassette into a tool at the point of use, remove the wafer cassette from the tool after processing, reload the wafer cassette into the lot box, and transport the lot box to the next point of use.