Multi-Cup Wafer Developer Drainage to Prevent Waste Mixing
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Solution Overview
Problem
The mixing of different developers in a single development chamber during semiconductor manufacturing leads to coagulation, blocking drains, and increases energy consumption and pollution due to the need for incineration of solid waste.
Innovation Solution
A semiconductor processing apparatus with an inner, middle, and outer cup configuration, along with a movable divider and controlled drain channels, separates waste developers by positioning wafers and adjusting rotation speeds to collect and divert developers into separate waste reservoirs, preventing mixing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single development chamber is used for multiple developers, then device complexity is reduced, but developer mixing occurs causing coagulation and drain blocking
Solution Approach 1:
The development chamber is segmented into multiple independent sections using partition walls. Each section can hold a different developer solution, preventing mixing while maintaining a unified chamber structure. The partition walls create separate collection zones for waste developers, ensuring they do not coagulate when combined.
2Ease of operation
If different developer solutions are allowed to mix, then ease of operation is improved, but harmful factors increase due to coagulation and pollution
Solution Approach 1:
The chamber is divided into separate sections that collect different developer wastes independently. This segmentation prevents harmful coagulation reactions between incompatible developers (e.g., TMAH and organic developers), eliminating the need for energy-intensive incineration and reducing environmental pollution.
Solution Approach 2:
Partition walls act as intermediary structures that physically separate different developer streams. These walls serve as mediators that prevent direct contact between incompatible chemicals while still allowing the system to process multiple developers efficiently.
3Device complexity
If a single waste reservoir is used for all developers, then device complexity is reduced, but energy consumption increases due to incineration requirements
Solution Approach 1:
The waste collection system is segmented into multiple separate reservoirs, each dedicated to a specific developer type. This eliminates the need to mix incompatible developers in a single reservoir, thereby eliminating the need for energy-intensive incineration processes and significantly reducing energy consumption.
4Manufacturing precision
If catch cups are installed to prevent developer sling-off, then manufacturing precision is improved, but developer mixing in drains occurs causing coagulation
Solution Approach 1:
The catch cup system is segmented into multiple independent cups, each positioned over a specific drain section. Each catch cup collects waste from its designated zone and directs it to a corresponding separate reservoir through dedicated channels. This prevents different developer wastes from mixing in the drains, maintaining drain functionality while preserving the benefits of catch cups for manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents developer mixing, maintains drain efficiency, reduces energy consumption, and minimizes environmental pollution by segregating waste developers into distinct reservoirs.
Implementation Method 1
rotating the first wafer while collecting excess first developer in a first channel... rotating the second wafer while collecting excess second developer in a second channel
Data Source
AI summary
A wafer processing apparatus according to the present disclosure includes an inner cup including a first cup wall and a first bottom surface, a middle cup enclosing the inner cup, the middle cup including a second cup wall and a second bottom surface between the first cup wall and the second cup wall, an outer cup enclosing the middle cup, the outer cup including a third cup wall and a third bottom surface between the second cup wall and the third cup wall, and a divider configured to move between a first position where a top surface of the divider is coplanar with the second bottom surface and a second position where the top surface of the divider rises above the second bottom surface.