Wafer Handler Quick Changeover via Modular Ring Adapters

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Solution Overview

Problem

Existing wafer handling equipment requires significant time and effort to switch between handling wafers of different sizes due to the tedious process of removing and reinserting numerous fasteners, leading to unproductive downtime.

Innovation Solution

The implementation of a wafer handler with a pusher arm extender, buffer assembly with movable rails, and a wafer table assembly featuring adaptable wafer ring adapters and plates, allowing for quick changeover between different wafer sizes by repositioning and relocking components without full removal of fasteners.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional fastener removal and reinsertion method is used to switch wafer sizes, then wafer handler can accommodate different wafer sizes, but changeover time becomes excessively long and unproductive

Engineering Contradiction:

Improvewafer size accommodationVSAvoidchangeover time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The wafer table assembly is segmented into modular components: the center body, wafer ring adapter, and wafer ring plate. These segments can be independently adjusted or replaced to accommodate different wafer sizes without requiring complete disassembly of the entire assembly.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system transitions from a static, fixed-configuration wafer table to a dynamic, adjustable configuration. The wafer ring adapter and wafer ring plate can be quickly repositioned and relocked at different locations on the center body, enabling rapid adaptation to various wafer sizes through controlled movement rather than complete removal and reinstallation.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If approximately two dozen individual fasteners are removed and reinserted to change wafer handler components, then wafer size switching is achieved, but operational complexity and risk of fastener loss increase

Engineering Contradiction:

Improvewafer size switching capabilityVSAvoidchangeover operation simplicity

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

Multiple fastening functions are merged into an integrated locking mechanism. Instead of requiring separate fasteners for each connection point, the wafer ring adapter and wafer ring plate utilize a unified locking system that secures multiple components simultaneously, reducing the number of discrete fastening operations required.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The locking mechanism serves multiple functions: it secures the wafer ring adapter to the center body, anchors the wafer ring plate to the adapter, and enables quick release and repositioning. This multi-functional locking system replaces the need for numerous specialized fasteners, simplifying the overall changing operation.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS7955041B2Quick changeover apparatus and methods for wafer handling

Publication Date: 2011.06.07 TEXAS INSTRUMENTS INC

AI summary

Quick changeover apparatus for wafer handlers capable of handling at least two sizes of wafer frames and methods of using such apparatus are disclosed.