Wafer Jig Identification Mark Alignment Inspection
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Solution Overview
Problem
Processing apparatus manufacturers face difficulties in obtaining and managing various types of wafers with identification marks, as they are not wafer manufacturers and risk damaging these wafers during the adjustment of identification mark reading mechanisms.
Innovation Solution
A wafer jig with an identification mark is created, comprising a circular plate with a wafer piece cut from a device wafer, where the identification mark is positionally aligned, and optionally includes notches for crystal orientation, allowing multiple types of identification marks to be applied to a single plate for efficient inspection of identification mark reading mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If processing apparatus manufacturers use actual device wafers with identification marks for inspection, then the inspection reliability is improved, but the risk of damaging precious wafers increases
Solution Approach 1:
The patent creates a wafer jig that copies the essential features of an actual device wafer, including a wafer piece with identification mark positioned on a circular plate matching the wafer diameter. This copy enables inspection of the identification mark reading mechanism without using precious actual wafers, thus maintaining inspection reliability while eliminating damage risk
Solution Approach 2:
The wafer jig serves as a disposable or reusable substitute for actual device wafers. Instead of risking damage to valuable wafers, manufacturers can use multiple wafer jigs for inspection purposes. The jig can be easily replaced if damaged, eliminating the harmful effect of wafer damage while maintaining inspection functionality
2Adaptability or versatility
If processing apparatus manufacturers obtain various types of wafers for adjustment, then the adaptability of identification mark reading mechanism is improved, but the difficulty of wafer management increases
Solution Approach 1:
The wafer jig is designed as a universal tool that can be used for adjusting and inspecting identification mark reading mechanisms for various types of wafers. By fixing different wafer pieces with different identification marks onto circular plates, a single wafer jig system can test multiple scenarios without requiring manufacturers to manage multiple actual wafer inventories
Solution Approach 2:
The wafer jig acts as an intermediary between the identification mark reading mechanism and actual device wafers. It provides a controlled, standardized interface for testing the reading mechanism's ability to handle various identification marks without the complexity of managing actual wafer procurement, storage, and handling
3Productivity
If multiple wafer pieces with different identification marks are fixed to a single circular plate, then the inspection efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple wafer pieces with different identification marks onto a single circular plate. This allows the inspection system to test multiple identification mark types in one inspection cycle, significantly improving efficiency. The wafer piece positioning and fixation methods are designed to minimize the increase in device complexity while enabling this multi-functional capability
Data Source
AI summary
Disclosed herein is a wafer jig with an identification mark for use in inspecting the function of an identification mark reading mechanism for reading an identification mark on a device wafer. The wafer jig includes a wafer piece cut from a region of a device wafer where an identification mark is formed, and a circular plate having the same diameter as the device wafer. The wafer piece is fixed to the circular plate such that the identification mark on the wafer piece is positionally aligned with the identification mark on the device wafer.