Wafer Jig Optical Communication for Cleanroom Robots
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Solution Overview
Problem
Conventional wafer jigs for robots require electrical cables for communication, making them difficult to miniaturize and unsuitable for applications with low resistivity to dust generation, such as semiconductor handling.
Innovation Solution
A wafer jig that uses light emitting and receiving parts to communicate with the robot, eliminating the need for electrical cables by emitting notification light to convey information, allowing for miniaturization, simplification, and weight reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an electrical cable is used to transmit signals between the jig and robot controller, then communication reliability is improved, but the jig size and complexity increase
Solution Approach 1:
The patent replaces the electrical cable connection (mechanical/electrical system) with an optical communication system using light emitting and receiving parts. The light receiving part detects light signals emitted by the light emitting part mounted on the robot, enabling cableless communication between the jig and robot controller, thus reducing jig complexity while maintaining communication reliability
Solution Approach 2:
The patent introduces light as an intermediary medium to transmit information between the robot and jig. The light emitting part converts electrical signals to light signals, and the light receiving part converts light signals back to electrical signals, enabling indirect communication without direct electrical cable connections, thereby reducing jig complexity
2Reliability
If an electrical cable is used for communication, then signal transmission is stable, but miniaturization of the jig becomes difficult
Solution Approach 1:
The patent substitutes the bulky electrical cable infrastructure with compact optical components (light emitting diode and photodetector). These optical components have significantly smaller form factors compared to electrical cable connections and associated shielding/connector hardware, enabling jig miniaturization while maintaining stable signal transmission through optical pathways
3Reliability
If an electrical cable is used to connect the jig, then communication is reliable, but dust generation increases in clean room environments
Solution Approach 1:
The patent replaces the electrical cable system with an optical communication system that requires no physical cable connections between the jig and robot. By using light transmission through air or transparent media, the system eliminates cable-related dust generation from cable movement, connectors, and shielding materials, making it suitable for clean room semiconductor manufacturing environments while maintaining communication reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables communication between the wafer jig and the robot without cables, enhancing the flexibility and accuracy of robot movements while reducing dust generation and maintaining a clean environment.
Implementation Method 1
a light source emitting notification light toward the light receiving part
Implementation Method 2
a light receiving part for detecting detection light emitted from the light emitting part
Data Source
AI summary
A wafer jig according to an embodiment may be used for a robot having a hand including a light emitting part and a light receiving part. The light receiving part detects detection light emitted from the light emitting part. The wafer jig includes a light source for emitting the notification light toward the light receiving part. The wafer jig outputs information to a hand side by emitting the notification light from the light source to the light receiving part.