Semiconductor Wafer Prober Simulator for Hardware-Agnostic Testing

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Solution Overview

Problem

Wafer probers and package handlers for semiconductor flash memory testing are expensive and not readily available, and existing simulator software is limited to specific manufacturers' equipment, failing to support a wide range of devices needed for testing.

Innovation Solution

A simulation method and system that allows for the emulation of wafer probers and package handlers, enabling software testing without physical hardware, using a controller and simulator program that responds to commands as if the physical devices were present, supporting various devices through a configurable interface and logging capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If physical wafer probers and package handlers are used for testing, then accurate hardware performance verification is achieved, but high cost and limited availability prevent widespread use

Engineering Contradiction:
Improvetesting accuracyVSAvoiddevice availability
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent creates a virtual copy of the physical wafer prober and package handler through simulator software. This virtual model replicates the hardware's behavior and response characteristics, allowing software testing to proceed without accessing the expensive physical equipment. The simulator receives commands from the controller software and generates appropriate responses, effectively copying the hardware's functional behavior for testing purposes.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The simulator acts as an intermediary between the controller software and the physical hardware. Instead of directly testing against the expensive wafer prober, the controller software interfaces with the simulator, which mediates the interaction by processing commands and generating responses. This intermediary layer enables comprehensive testing while eliminating the need for direct hardware access.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If manufacturer-specific simulator software is used, then compatibility with that specific prober is achieved, but support for other prober models is lost

Engineering Contradiction:
Improvedevice compatibilityVSAvoidmulti-device support
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent implements a universal simulator that can support multiple prober and handler models through a plugin architecture. The core simulator engine remains model-agnostic, while specific device behaviors are implemented as interchangeable plugins. This allows the same simulator interface to work with different prober models (e.g., TTS, EG, TEL) by simply loading the appropriate plugin, achieving both compatibility and versatility.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The simulator is segmented into modular components: a core engine that handles general simulation logic and device-specific plugins that implement model-specific behaviors. This segmentation allows the core simulator to remain universal while supporting multiple device types through separate, interchangeable plugin modules. Each plugin encapsulates the characteristics of a specific prober model without affecting others.

Inventive Principle:
Principle #1Segmentation

3Productivity

If upgraded prober models are purchased for testing, then testing capability is improved, but high cost and upgrade requirements create barriers

Engineering Contradiction:
Improvetesting capabilityVSAvoidhardware requirements
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Instead of requiring physical upgraded prober models to test new software capabilities, the patent creates virtual copies through the simulator that can emulate the behavior of upgraded devices. The simulator can be configured to match the characteristics of newer prober models, allowing software to be tested against future hardware configurations without actually purchasing the upgraded physical equipment.

Inventive Principle:
Principle #26Copying

Data Source

PatentUS8131531B2System and method for simulating a semiconductor wafer prober and a class memory test handler
Publication Date: 2012.03.06 ADVANTEST CORP
  • US8131531B2 patent drawing
  • US8131531B2 patent drawing
  • US8131531B2 patent drawing

AI summary

A method runs a simulation. The method comprises receiving a selection of a device. The device is one of a prober used in wafer testing and a handler used in package testing. The method comprises receiving at least one parameter for a set of parameters for the simulation. The method comprises running the simulation by executing commands to be performed as if the device were present. A controller supplies the set of commands. Results from the simulation indicate a performance of the controller.