Wafer Robot Hand Lightened Part Inertia Reduction
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Solution Overview
Problem
Conventional wafer transport robots with damping means at the end effector increase moment of inertia, reducing controllability and complicating the configuration, leading to reduced motion control performance.
Innovation Solution
A robot design with a lightened part at the distal end of the hand, reducing weight and moment of inertia, thereby increasing natural frequency and allowing for more accurate motion control while simplifying the structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If damping means is provided at the distal end of the end effector, then the natural frequency of the hand can be adjusted, but the moment of inertia of the hand increases and controllability of motion is reduced
Solution Approach 1:
The invention extracts the damping function from a separate mounted component and integrates it into the hand structure itself through strategically positioned lightened parts. This eliminates the need for additional damping components while achieving the same vibration control effect, thereby maintaining controllability.
Solution Approach 2:
The invention applies local quality changes by creating lightened parts at specific locations (distal end and intermediate regions) of the hand rather than uniformly modifying the entire structure. This localized modification allows precise control of natural frequency while minimizing impact on overall moment of inertia and controllability.
2Reliability
If damping means is provided at the distal end of the end effector, then the natural frequency of the hand can be adjusted, but the configuration of the end effector becomes complicated
Solution Approach 1:
The invention merges the damping function with the structural components of the hand by integrating lightened parts directly into the hand's geometry. This consolidation eliminates separate damping components and their associated mounting structures, thereby simplifying the overall configuration while maintaining vibration control functionality.
Solution Approach 2:
The lightened parts serve multiple functions simultaneously: they act as both structural elements of the hand and damping components for vibration control. This multi-functionality reduces the number of separate components needed, thereby simplifying the configuration.
3Reliability
If weight is mounted to the hand to adjust natural frequency, then the natural frequency can be controlled, but the moment of inertia increases and motion control accuracy is reduced
Solution Approach 1:
Instead of adding weight to control natural frequency (which increases moment of inertia), the invention inverts the approach by removing material to create lightened parts. This inversion achieves natural frequency control through strategic mass distribution rather than mass addition, thereby maintaining lower moment of inertia and better motion control accuracy.
4Reliability
If weight is mounted to the hand to adjust natural frequency, then the natural frequency can be controlled, but the structure of the hand becomes complicated
Solution Approach 1:
The invention merges the frequency control function with the hand's structural design by incorporating lightened parts as integral elements of the hand geometry. This eliminates separate weight mounting structures and their associated complexity, achieving a simpler overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The robot achieves suppressed amplitude and improved motion control performance with a simpler configuration, enhancing controllability and reducing the risk of contamination in clean room environments.
Implementation Method 1
the natural frequency of the hand becomes higher. As a result, the amplitude level of the hand can be suppressed
Data Source
AI summary
A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.