Wafer Transfer Robot Layout for Wide-Range Access Without Interference
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Solution Overview
Problem
Existing robot systems for semiconductor manufacturing face challenges in efficiently conveying substrates like wafers across a wide range without increasing costs or complexity.
Innovation Solution
The robot system employs a unique configuration with a first base, first and second movable portions, and a control unit, allowing for efficient movement and access to substrates through overlapping arm trajectories and strategically positioned rotation shafts, enabling wider operational ranges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a robot system uses conventional arm configurations for substrate conveyance, then the structure remains simple and cost-effective, but the operational range is limited and interference between arms occurs
Solution Approach 1:
The patent introduces a second base that moves along the y-axis, adding a new dimension of motion to the robot system. This allows the hand to access positions that would otherwise be unreachable by the first arm alone, significantly expanding the operational range without requiring a completely complex reconfiguration of the entire arm system.
Solution Approach 2:
The robot system is divided into multiple independent movable portions: the first movable portion (arm) and the second movable portion (base). This segmentation allows each component to perform its specific function independently, reducing interference between arms while maintaining overall system simplicity and cost-effectiveness.
2Adaptability or versatility
If the robot arm extends to cover a wider area, then the operational range increases, but interference between the arm and base occurs
Solution Approach 1:
By introducing the second base that moves along the y-axis, the patent creates additional spatial separation between the first arm and the base. This dimensional change allows the arm to extend further without colliding with the base, expanding the accessible region while eliminating interference.
Solution Approach 2:
The second base is designed to move dynamically along the y-axis based on the operational requirements. This dynamic adjustment allows the system to optimize the distance between the arm and base during operation, preventing interference while maximizing the accessible region.
3Area of stationary object
If the robot system uses a compact configuration, then the housing width can be reduced, but the arm trajectory width increases relative to the available space
Solution Approach 1:
The second base moving along the y-axis provides an additional degree of freedom that allows the arm to reach targets without requiring large horizontal trajectories. This enables a compact housing width while maintaining arm trajectory flexibility through vertical adjustment.
Solution Approach 2:
Dividing the system into two independent movable portions allows each to operate within a smaller individual space envelope. The first arm handles horizontal positioning while the second base handles vertical positioning, enabling compact overall dimensions without sacrificing trajectory flexibility.
Data Source
AI summary
Provided is a robot arranged in a housing, the robot including: a first movable portion; a second movable portion having a hand holding a wafer; and a control unit which controls the first movable portion and the second movable portion so as to convey the wafer in a state where the wafer held by the hand is located inside an operation region defined in a space between a front wall and a back wall so as not to overlap an open/close region for a cassette opener, which is provided at a position corresponding to an opening of the front wall, to open and close a cassette, and to cause the hand to access the opening of the front wall in a state where the hand is parallel to a horizontal plane.