Semiconductor Wafer Test Power Control Between Ready and Waiting Modes

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Solution Overview

Problem

Semiconductor wafer test apparatuses consume significant power during idle periods due to maintaining a ready mode, leading to inefficient energy usage and challenges in manually cutting off power to numerous hardware devices.

Innovation Solution

A semiconductor wafer test system that includes a test operating server to manage power supply by switching the operating mode to a waiting mode based on a wafer test schedule, cutting off power to non-essential hardware devices during idle times and automatically transitioning to a ready mode when needed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the semiconductor wafer test apparatus is maintained in a ready mode during idle periods, then the apparatus can quickly resume testing when needed, but power consumption increases significantly

Engineering Contradiction:
Improveresume testing speedVSAvoidpower consumption
Core Design Contradiction:
SpeedVSUse of energy by moving object

Solution Approach 1:

The system dynamically transitions between ready mode and waiting mode based on whether testing is currently being performed. During idle periods, the apparatus switches to waiting mode to reduce power consumption, and automatically transitions back to ready mode when testing is required, optimizing the balance between responsiveness and energy efficiency

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system changes operational parameters by switching between different operating modes (ready mode and waiting mode). In waiting mode, power supply to non-essential hardware devices is cut off, fundamentally changing the power consumption parameter while maintaining the ability to restore full operation when needed

Inventive Principle:
Principle #35Parameter changes

2Use of energy by moving object

If power is cut off to hardware devices during idle periods, then power consumption is reduced, but the apparatus cannot quickly resume testing

Engineering Contradiction:
Improvepower consumptionVSAvoidtime to resume testing
Core Design Contradiction:
Use of energy by moving objectVSLoss of time

Solution Approach 1:

The system performs preliminary actions by maintaining the apparatus in a waiting mode rather than completely shutting down. Essential hardware devices remain powered or in a low-power state, preparing the system in advance for quick resumption of testing when needed, thus reducing both power consumption and resume time compared to a complete shutdown

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system dynamically adjusts its operational state between waiting mode and ready mode. This dynamic transition allows the system to optimize the trade-off between power consumption and resume time by selecting the appropriate mode based on current testing requirements

Inventive Principle:
Principle #15Dynamics

3Use of energy by moving object

If the apparatus switches to waiting mode, then power consumption is reduced, but manual power management of numerous hardware devices becomes complex

Engineering Contradiction:
Improvepower consumptionVSAvoidpower management complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The system merges the power management control of multiple hardware devices into a unified automated system. The test operating server coordinates power supply to various hardware devices (PE boards, DPS boards, ALPG board, test head interface board) as a group, switching them between ready and waiting modes collectively, thus simplifying what would otherwise be complex manual management of individual device power states

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system implements self-service power management where the test operating server automatically controls power supply to hardware devices based on testing requirements. The system autonomously transitions between ready and waiting modes without requiring manual intervention, eliminating the complexity of manual power management while achieving power consumption reduction

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS12461142B2Semiconductor wafer test system for controlling supply of power to semiconductor wafer test apparatus and method of controlling supply of power to semiconductor wafer test apparatus
Publication Date: 2025.11.04 YC CORPORATION
  • US12461142B2 patent drawing
  • US12461142B2 patent drawing
  • US12461142B2 patent drawing

AI summary

A semiconductor wafer test system for controlling the supply of power to a semiconductor wafer test apparatus is provided. The semiconductor wafer test system includes a test operating server and the semiconductor wafer test apparatus. The test operating server manages a wafer test schedule and allocates lots to a prober, which loads wafers into the semiconductor wafer test apparatus, in accordance with the wafer test schedule. The test operating server sends a mode switch request to the semiconductor wafer test apparatus in accordance with the wafer test schedule, and the semiconductor wafer test apparatus is switched to a waiting mode in response to receipt of a request to switch to the waiting mode from the test operating server, and is switched to a ready mode in response to receipt of a request to switch to the ready mode from the test operating server.